Content

Metrology data

Detector epix10ka2m.0 (old), previous

2020-07-08 email from Chris Kenney
Kenney, Christopher J.<kenney@slac.stanford.edu>
​
Dubrovin, Mikhail​
​Nakahara, Kazutaka;​Nayak, Bhavna;​Hansson, Conny;​
Blaj, Gabriel​
HI Mikhail,

Here is the metrology file for repaired ePix10kA 2M

Let me know if you have any trouble with it please.

THanks,

Chris

Measurement map

WARNING: Q0 is in the lower right corner - use parameter -r2

See also: Optical metrology of epix10ka2m.0 from 2020-06-25

Quality check

optical_metrology_check 2024-08-09-epix10ks2m.0-metrology.txt

quality check for raw metrology data
X-Y quality check for optical metrology measurements
----------------------------------------------------------------------------------------------------------------------------
segm: S1 S2 dS1 dS2 L1 L2 dL1 dL2 angle(deg) D1 D2 dD d(dS) d(dL)
----------------------------------------------------------------------------------------------------------------------------
segm: 0 36704 36758 -750 -696 39700 39704 640 644 1.04328 54078 54116 -37 -54 -4
segm: 1 36687 36677 -756 -766 39682 39725 630 673 1.09806 54030 54102 -72 10 -43
segm: 2 36699 36726 -353 -326 39709 39706 320 317 0.48987 54089 54077 12 -27 3
segm: 3 36705 36714 -661 -652 39727 39699 630 602 0.94708 54101 54082 19 -9 28
segm: 4 36708 36703 613 608 39716 39691 -580 -605 0.88094 54064 54116 -52 5 25
segm: 5 36712 36687 597 572 39725 39692 -559 -592 0.84332 54054 54103 -48 25 33
segm: 6 36708 36724 931 947 39713 39669 -840 -884 1.35524 54091 54079 11 -16 44
segm: 7 36683 36655 626 598 39685 39700 -566 -551 0.88335 54053 54039 13 28 -15
segm: 8 36698 36708 -663 -653 39696 39707 564 575 0.94952 54048 54103 -54 -10 -11
segm: 9 36705 36700 -595 -600 39727 39723 526 522 0.86172 54075 54111 -36 5 4
segm:10 36717 36692 -515 -540 39716 39709 494 487 0.76101 54088 54080 7 25 7
segm:11 36689 36671 -882 -900 39702 39685 851 834 1.28590 54079 54046 33 18 17
segm:12 36715 36714 724 723 39719 39693 -661 -687 1.04390 54091 54092 0 1 26
segm:13 36719 36714 643 638 39660 39709 -639 -590 0.92466 54061 54087 -26 5 -49
segm:14 36674 36675 775 776 39699 39688 -720 -731 1.11926 54051 54060 -9 -1 11
segm:15 36676 36708 699 731 39677 39684 -670 -663 1.03230 54053 54058 -4 -32 -7
----------------------------------------------------------------------------------------------------------------------------

WARNING segm 1: |-72| > 60.0

Z quality check for optical metrology measurements
-----------------------------------------------------------------------------------------------------------------------------------------
segm: SA LA XSize YSize dZS1 dZS2 dZL1 dZL2 dZSA dZLA ddZS ddZL dZX dZY angXZ(deg) angYZ(deg) dz3(um)
-----------------------------------------------------------------------------------------------------------------------------------------
segm: 0 36731 39702 36731 39702 412 397 143 128 404 135 15 15 404 135 0.63094 0.19555 15.617
segm: 1 36682 39703 36682 39703 588 376 290 78 482 184 212 212 482 184 0.75282 0.26553 212.135
segm: 2 36712 39707 36712 39707 461 460 310 309 460 309 1 1 460 309 0.71865 0.44658 1.313
segm: 3 36709 39713 36709 39713 550 637 227 314 593 270 -87 -87 593 270 0.92625 0.39026 -87.022
segm: 4 36705 39703 39703 36705 -851 304 569 1724 -273 1146 -1155 -1155 1146 -273 1.65404 -0.42691 1154.824
segm: 5 36699 39708 39708 36699 152 212 445 505 182 475 -60 -60 475 182 0.68535 0.28414 60.471
segm: 6 36716 39691 39691 36716 114 138 406 430 126 418 -24 -24 418 126 0.60338 0.19662 24.392
segm: 7 36669 39692 39692 36669 292 164 519 391 228 455 128 128 455 228 0.65676 0.35625 -127.951
segm: 8 36703 39701 36703 39701 240 476 51 287 358 169 -236 -236 358 169 0.55884 0.24389 -235.914
segm: 9 36702 39725 36702 39725 412 520 233 341 466 287 -108 -108 466 287 0.72743 0.41394 -108.071
segm:10 36704 39712 36704 39712 586 488 189 91 537 140 98 98 537 140 0.83820 0.20199 97.554
segm:11 36680 39693 36680 39693 483 561 226 304 522 265 -78 -78 522 265 0.81533 0.38251 -78.328
segm:12 36714 39706 39706 36714 203 450 446 693 326 569 -247 -247 569 326 0.82173 0.50951 247.276
segm:13 36716 39684 39684 36716 426 331 458 363 378 410 95 95 410 378 0.59265 0.59063 -95.485
segm:14 36674 39693 39693 36674 156 214 519 577 185 548 -58 -58 548 185 0.79096 0.28902 58.133
segm:15 36692 39680 39680 36692 265 113 511 359 189 435 152 152 435 189 0.62808 0.29513 -152.311
-----------------------------------------------------------------------------------------------------------------------------------------

WARNING segm 1: |212.1| > 100.0
WARNING segm 4: |1154.8| > 100.0
WARNING segm 7: |-128.0| > 100.0
WARNING segm 8: |-235.9| > 100.0
WARNING segm 9: |-108.1| > 100.0
WARNING segm 12: |247.3| > 100.0
WARNING segm 15: |-152.3| > 100.0

Fixing z deviation of segment 4

WARNING segm 4: |1154.8| > 100.0

  • shows that a single point measurement on segmeent 4 deviates >1mm (panel is not flat)
  • point 2 in this panel has largest deviation of z from others - apply 1.234 mm correction to this point


correction of the large deviation in z
Quad 1
point   X       Y       Z
1       537063  1045648 390930
#2       536483  1082356 390079 # correction of Z 0079 -> 1234
2       536483  1082356 391234
3       576174  1082964 391803
4       576779  1046261 391499


optical_metrology_check 2024-08-09-epix10ks2m.0-metrology-corr.txt


metrology check for corrected z point
Z quality check for optical metrology measurements
-----------------------------------------------------------------------------------------------------------------------------------------
segm:        SA      LA   XSize   YSize    dZS1  dZS2  dZL1  dZL2    dZSA  dZLA  ddZS  ddZL     dZX   dZY   angXZ(deg) angYZ(deg) dz3(um)
-----------------------------------------------------------------------------------------------------------------------------------------
segm: 0   36731   39702   36731   39702     412   397   143   128     404   135    15    15     404   135   0.63094    0.19555     15.617
segm: 1   36682   39703   36682   39703     588   376   290    78     482   184   212   212     482   184   0.75282    0.26553    212.135
segm: 2   36712   39707   36712   39707     461   460   310   309     460   309     1     1     460   309   0.71865    0.44658      1.313
segm: 3   36709   39713   36709   39713     550   637   227   314     593   270   -87   -87     593   270   0.92625    0.39026    -87.022
segm: 4   36705   39703   39703   36705     304   304   569   569     304   569     0     0     569   304   0.82106    0.47452      0.397
segm: 5   36699   39708   39708   36699     152   212   445   505     182   475   -60   -60     475   182   0.68535    0.28414     60.471
segm: 6   36716   39691   39691   36716     114   138   406   430     126   418   -24   -24     418   126   0.60338    0.19662     24.392
segm: 7   36669   39692   39692   36669     292   164   519   391     228   455   128   128     455   228   0.65676    0.35625   -127.951
segm: 8   36703   39701   36703   39701     240   476    51   287     358   169  -236  -236     358   169   0.55884    0.24389   -235.914
segm: 9   36702   39725   36702   39725     412   520   233   341     466   287  -108  -108     466   287   0.72743    0.41394   -108.071
segm:10   36704   39712   36704   39712     586   488   189    91     537   140    98    98     537   140   0.83820    0.20199     97.554
segm:11   36680   39693   36680   39693     483   561   226   304     522   265   -78   -78     522   265   0.81533    0.38251    -78.328
segm:12   36714   39706   39706   36714     203   450   446   693     326   569  -247  -247     569   326   0.82173    0.50951    247.276
segm:13   36716   39684   39684   36716     426   331   458   363     378   410    95    95     410   378   0.59265    0.59063    -95.485
segm:14   36674   39693   39693   36674     156   214   519   577     185   548   -58   -58     548   185   0.79096    0.28902     58.133
segm:15   36692   39680   39680   36692     265   113   511   359     189   435   152   152     435   189   0.62808    0.29513   -152.311
-----------------------------------------------------------------------------------------------------------------------------------------

  WARNING segm  1:  |212.1| > 100.0
  WARNING segm  7:  |-128.0| > 100.0
  WARNING segm  8:  |-235.9| > 100.0
  WARNING segm  9:  |-108.1| > 100.0
  WARNING segm 12:  |247.3| > 100.0
  WARNING segm 15:  |-152.3| > 100.0


Geometry file

optical_metrology_epix10ka2m -i 2024-08-09-epix10ks2m.0-metrology-corr.txt -o 2024-08-09-epix10ks2m.0-geometry.txt -v1 -r2

2024-08-09-epix10ks2m.0-geometry.txt

essential part of the geometry file
header
...
# HDR PARENT IND     OBJECT IND    X0[um]   Y0[um]   Z0[um]   ROT-Z  ROT-Y  ROT-X     TILT-Z    TILT-Y    TILT-X

      CAMERA  0  EPIX10KA:V1  0     59844   -22241      -76      90      0      0    0.48987   0.04112  -0.03980
      CAMERA  0  EPIX10KA:V1  1     60431   -62816      -39      90      0      0    0.94708  -0.01010  -0.24504
      CAMERA  0  EPIX10KA:V1  2     17933   -22959       44      90      0      0    1.09806  -0.13421  -0.07185
      CAMERA  0  EPIX10KA:V1  3     18727   -63726      -56      90      0      0    1.04328  -0.20348   0.05148
      CAMERA  0  EPIX10KA:V1  4    -22260   -59944      -27       0      0      0    0.88335  -0.02454  -0.04531
      CAMERA  0  EPIX10KA:V1  5    -62928   -60698       14       0      0      0    0.88094   0.13926   0.07415
      CAMERA  0  EPIX10KA:V1  6    -23036   -17896      -90       0      0      0    1.35524  -0.08156  -0.19896
      CAMERA  0  EPIX10KA:V1  7    -63702   -18688      120       0      0      0    0.84332   0.00433  -0.11709
      CAMERA  0  EPIX10KA:V1  8    -60020    22316       19     270      0      0    0.94952   0.15730  -0.12332
      CAMERA  0  EPIX10KA:V1  9    -60722    62705        7     270      0      0    0.86172  -0.01226   0.04761
      CAMERA  0  EPIX10KA:V1 10    -17940    23051       25     270      0      0    1.28590   0.01371   0.13199
      CAMERA  0  EPIX10KA:V1 11    -18702    63696       21     270      0      0    0.76101   0.19982   0.15844
      CAMERA  0  EPIX10KA:V1 12     22299    59917       18     180      0      0    0.92466   0.08879  -0.19116
      CAMERA  0  EPIX10KA:V1 13     63030    60666       52     180      0      0    1.11926  -0.10826   0.10936
      CAMERA  0  EPIX10KA:V1 14     23249    17974      -58     180      0      0    1.04390  -0.13925  -0.11002
      CAMERA  0  EPIX10KA:V1 15     63797    18643       24     180      0      0    1.03230   0.05487   0.10462
          IP  0       CAMERA  0         0        0    10000      90      0      0    0.00000   0.00000   0.00000

[I] L1023: geometry constants saved in file 2024-08-09-epix10ks2m.0-geometry.txt
ana-4.0.62-py3 [dubrovin@sdflogin001:~/LCLS/ref-detector/alignment/epix10ka2m/calib-xxx-epix10ka2m.0-2024-08-09]$

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