- Created by Mikhail Dubrovin, last modified on Aug 31, 2020
Metrology data
Detector epix10ka2m.0 (old), previous 2018-11-18 non-complete metrology of epix10ka2m.0
2020-07-08 email from Chris Kenney Expand source
Hi Philip, Chris, and Mikhail, My apologies for not getting this to you sooner. Additional apologies in that the order we took the measurements in is rotated from our "standard" and we were unable to set the origin to zero. In the picture the XPP mounting bars on on the left side and so this would be UP. A map of the sensor corners measurement ordering and the quad number locations is attached along with a picture of the setup. The origin (not 0-0-0) is in the upper left of the picture. Along with the Excel spreadsheet. Please ask questions as I know this can be confusing. Thanks, Chris
Measurement map
Quality check
quality check for raw metrology data Expand source
X-Y quality check for optical metrology measurements ---------------------------------------------------------------------------------------------------------------------------- segm: S1 S2 dS1 dS2 L1 L2 dL1 dL2 angle(deg) D1 D2 dD d(dS) d(dL) ---------------------------------------------------------------------------------------------------------------------------- segm: 0 36699 36691 -477 -485 39689 40683 -558 436 0.68576 54051 54789 -737 8 -994 segm: 1 36702 36696 -483 -489 39683 39678 439 434 0.70171 54044 54063 -19 6 5 segm: 2 36716 36681 -72 -107 39693 39650 70 27 0.12926 54018 54068 -49 35 43 segm: 3 36690 36705 -405 -390 39713 39684 390 361 0.57368 54070 54058 11 -15 29 segm: 4 36718 36692 388 362 39723 39746 -323 -300 0.54072 54121 54069 51 26 -23 segm: 5 36702 36703 332 333 39721 39701 -306 -326 0.47973 54069 54083 -13 -1 20 segm: 6 36599 36701 594 696 39702 39700 -631 -633 0.93077 54012 54065 -53 -102 2 segm: 7 36664 36664 369 369 39714 39708 -343 -349 0.53238 54046 54054 -7 0 6 segm: 8 36677 36713 -412 -376 39744 39682 420 358 0.56842 54092 54055 36 -36 62 segm: 9 36695 36728 -338 -305 39744 39719 319 294 0.46362 54104 54090 13 -33 25 segm:10 36702 36736 -263 -229 39708 39568 371 231 0.35558 54087 53980 106 -34 140 segm:11 36725 36688 -614 -651 39683 39703 596 616 0.91292 54086 54055 30 37 -20 segm:12 36706 36692 476 462 39668 39671 -429 -426 0.67736 54050 54040 10 14 -3 segm:13 36672 36714 523 565 39697 39708 -512 -501 0.78501 54064 54069 -5 -42 -11 segm:14 36705 36692 538 525 39731 39700 -479 -510 0.76673 54078 54082 -3 13 31 segm:15 36696 36695 473 472 39712 39699 -421 -434 0.68179 54076 54062 13 1 13 ---------------------------------------------------------------------------------------------------------------------------- WARNING segm 0: |-737| > 60.0 WARNING segm 0: |-994| > 60.0 WARNING segm 6: |-102| > 60.0 WARNING segm 8: |62| > 60.0 WARNING segm 10: |106| > 60.0 WARNING segm 10: |140| > 60.0 Z quality check for optical metrology measurements ----------------------------------------------------------------------------------------------------------------------------------------- segm: SA LA XSize YSize dZS1 dZS2 dZL1 dZL2 dZSA dZLA ddZS ddZL dZX dZY angXZ(deg) angYZ(deg) dz3(um) ----------------------------------------------------------------------------------------------------------------------------------------- segm: 0 36695 40186 36695 40186 44 248 54 258 146 156 -204 -204 146 156 0.22796 0.22242 -202.642 segm: 1 36699 39680 36699 39680 85 115 -30 0 100 -15 -30 -30 100 -15 0.15612 -0.02166 -30.010 segm: 2 36698 39671 36698 39671 146 274 23 151 210 87 -128 -128 210 87 0.32786 0.12565 -128.163 segm: 3 36697 39698 36697 39698 171 109 1 -61 140 -30 62 62 140 -30 0.21858 -0.04330 62.067 segm: 4 36705 39734 39734 36705 8 89 26 107 48 66 -81 -81 66 48 0.09589 0.07571 80.991 segm: 5 36702 39711 39711 36702 -71 -149 204 126 -110 165 78 78 165 -110 0.23806 -0.17172 -77.894 segm: 6 36650 39701 39701 36650 0 14 24 38 7 31 -14 -14 31 7 0.04474 0.01094 14.000 segm: 7 36664 39711 39711 36664 -14 -42 123 95 -28 109 28 28 109 -28 0.15727 -0.04376 -27.981 segm: 8 36695 39713 36695 39713 235 111 0 -124 173 -62 124 124 173 -62 0.27012 -0.08945 124.224 segm: 9 36711 39731 36711 39731 84 152 -20 48 118 14 -68 -68 118 14 0.18416 0.02019 -67.912 segm:10 36719 39638 36719 39638 76 220 -241 -97 148 -169 -144 -144 148 -169 0.23094 -0.24428 -143.077 segm:11 36706 39693 36706 39693 82 103 -2 19 92 8 -21 -21 92 8 0.14438 0.01227 -21.083 segm:12 36699 39669 39669 36699 36 199 79 242 117 160 -163 -163 160 117 0.23181 0.18344 163.008 segm:13 36693 39702 39702 36693 75 42 85 52 58 68 33 33 68 58 0.09885 0.09135 -33.110 segm:14 36698 39715 39715 36698 169 165 160 156 167 158 4 4 158 167 0.22794 0.26073 -3.817 segm:15 36695 39705 39705 36695 96 65 177 146 80 161 31 31 161 80 0.23305 0.12569 -30.939 ----------------------------------------------------------------------------------------------------------------------------------------- WARNING segm 0: |-202.6| > 100.0 WARNING segm 2: |-128.2| > 100.0 WARNING segm 8: |124.2| > 100.0 WARNING segm 10: |-143.1| > 100.0 WARNING segm 12: |163.0| > 100.0
quality check for corrected metrology in 3-points Expand source
Corrected points: Quad 0 point X Y Z #4 95420 -4982 158686 4 95420 -3988 158686 Quad 1 point X Y Z #9 15847 43156 158511 9 15847 43054 158511 Quad 2 point X Y Z #12 58727 123727 158774 12 58727 123587 158774 X-Y quality check for optical metrology measurements ---------------------------------------------------------------------------------------------------------------------------- segm: S1 S2 dS1 dS2 L1 L2 dL1 dL2 angle(deg) D1 D2 dD d(dS) d(dL) ---------------------------------------------------------------------------------------------------------------------------- segm: 0 36699 36691 -477 -485 39689 39689 436 436 0.69435 54051 54063 -11 8 0 segm: 1 36702 36696 -483 -489 39683 39678 439 434 0.70171 54044 54063 -19 6 5 segm: 2 36716 36681 -72 -107 39693 39650 70 27 0.12926 54018 54068 -49 35 43 segm: 3 36690 36705 -405 -390 39713 39684 390 361 0.57368 54070 54058 11 -15 29 segm: 4 36718 36692 388 362 39723 39746 -323 -300 0.54072 54121 54069 51 26 -23 segm: 5 36702 36703 332 333 39721 39701 -306 -326 0.47973 54069 54083 -13 -1 20 segm: 6 36701 36701 696 696 39702 39700 -631 -633 1.00435 54082 54065 16 0 2 segm: 7 36664 36664 369 369 39714 39708 -343 -349 0.53238 54046 54054 -7 0 6 segm: 8 36677 36713 -412 -376 39744 39682 420 358 0.56842 54092 54055 36 -36 62 segm: 9 36695 36728 -338 -305 39744 39719 319 294 0.46362 54104 54090 13 -33 25 segm:10 36702 36736 -263 -229 39708 39708 231 231 0.35496 54087 54082 4 -34 0 segm:11 36725 36688 -614 -651 39683 39703 596 616 0.91292 54086 54055 30 37 -20 segm:12 36706 36692 476 462 39668 39671 -429 -426 0.67736 54050 54040 10 14 -3 segm:13 36672 36714 523 565 39697 39708 -512 -501 0.78501 54064 54069 -5 -42 -11 segm:14 36705 36692 538 525 39731 39700 -479 -510 0.76673 54078 54082 -3 13 31 segm:15 36696 36695 473 472 39712 39699 -421 -434 0.68179 54076 54062 13 1 13 ---------------------------------------------------------------------------------------------------------------------------- WARNING segm 8: |62| > 60.0 Z quality check for optical metrology measurements ----------------------------------------------------------------------------------------------------------------------------------------- segm: SA LA XSize YSize dZS1 dZS2 dZL1 dZL2 dZSA dZLA ddZS ddZL dZX dZY angXZ(deg) angYZ(deg) dz3(um) ----------------------------------------------------------------------------------------------------------------------------------------- segm: 0 36695 39689 36695 39689 44 248 54 258 146 156 -204 -204 146 156 0.22796 0.22520 -204.009 segm: 1 36699 39680 36699 39680 85 115 -30 0 100 -15 -30 -30 100 -15 0.15612 -0.02166 -30.010 segm: 2 36698 39671 36698 39671 146 274 23 151 210 87 -128 -128 210 87 0.32786 0.12565 -128.163 segm: 3 36697 39698 36697 39698 171 109 1 -61 140 -30 62 62 140 -30 0.21858 -0.04330 62.067 segm: 4 36705 39734 39734 36705 8 89 26 107 48 66 -81 -81 66 48 0.09589 0.07571 80.991 segm: 5 36702 39711 39711 36702 -71 -149 204 126 -110 165 78 78 165 -110 0.23806 -0.17172 -77.894 segm: 6 36701 39701 39701 36701 0 14 24 38 7 31 -14 -14 31 7 0.04474 0.01093 14.001 segm: 7 36664 39711 39711 36664 -14 -42 123 95 -28 109 28 28 109 -28 0.15727 -0.04376 -27.981 segm: 8 36695 39713 36695 39713 235 111 0 -124 173 -62 124 124 173 -62 0.27012 -0.08945 124.224 segm: 9 36711 39731 36711 39731 84 152 -20 48 118 14 -68 -68 118 14 0.18416 0.02019 -67.912 segm:10 36719 39708 36719 39708 76 220 -241 -97 148 -169 -144 -144 148 -169 0.23094 -0.24385 -143.925 segm:11 36706 39693 36706 39693 82 103 -2 19 92 8 -21 -21 92 8 0.14438 0.01227 -21.083 segm:12 36699 39669 39669 36699 36 199 79 242 117 160 -163 -163 160 117 0.23181 0.18344 163.008 segm:13 36693 39702 39702 36693 75 42 85 52 58 68 33 33 68 58 0.09885 0.09135 -33.110 segm:14 36698 39715 39715 36698 169 165 160 156 167 158 4 4 158 167 0.22794 0.26073 -3.817 segm:15 36695 39705 39705 36695 96 65 177 146 80 161 31 31 161 80 0.23305 0.12569 -30.939 ----------------------------------------------------------------------------------------------------------------------------------------- WARNING segm 0: |-204.0| > 100.0 WARNING segm 2: |-128.2| > 100.0 WARNING segm 8: |124.2| > 100.0 WARNING segm 10: |-143.9| > 100.0 WARNING segm 12: |163.0| > 100.0
References
- Optical metrology of epix10ka2m.0 from 2018-11-18
- Optical metrology of epix10ka2m.1 from 2020-02-25
- 2018-11-18 non-complete metrology of epix10ka2m.0
- EPIX10KA2M References
- EPIX10KA2M and EPIX10KAQUAD
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