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Vacuum System Hardware

Interlocking and Monitoring Hardware

Gate Valves

  • VAT Series 48 (where RF shield is required)
  • VAT Series 47 (where RF shield is not required)
  • SLAC 380-210, Allen-Bradley PLC Two Valve Valve Controller
    • SD-380-210-00 Schematic (PDF)

Gauges

Gauge Controller

Ion Pumps

  • Noble Diode type pumps are recommended. Pumps must have StarCell connector.

Ion Pump Controller

Turbo Pump Controller

Roughing and Backing Pumps

Residual Gas Analyzer

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