You are viewing an old version of this page. View the current version.
Compare with Current
View Page History
« Previous
Version 10
Next »
Vacuum System Hardware
Interlocking and Monitoring Hardware
- Allen-Bradley ControlLogix 5000 Series
Gate Valves
- VAT Series 48 (where RF shield is required)
- VAT Series 47 (where RF shield is not required)
- SLAC 233-808, VAT Valve Local Controller (J-Box)
- SLAC 380-210, Allen-Bradley PLC Two Valve Valve Controller
- SD-380-210-00 Schematic (PDF)
Gauges
- MKS 422 Cold Cathode Gauge
- MKS 317 Ehnanced Convection Pirani
- Helix / Granville-Phillips Bayard-Alpert Gauges
Gauge Controller
- MKS 937B
- MKS / HPS 937A
- MKS / HPS 937 (Oldest model)
- Helix / Granville-Phillips 307
Ion Pumps
- Noble Diode type pumps are recommended. Pumps must have StarCell connector.
Ion Pump Controller
- Gamma Digitel Multiple Pump Controller
Turbo Pump Controller
- Varian Turbo Pump Controller
- Leybold/Oerlikon
Roughing and Backing Pumps
Residual Gas Analyzer