Optics | Axis | encoder | Repeatability | Range | MPS switch | Limit switch | Actuator | CLF | CLF Direction | Forward Move Direction | Reverse Move direction |
Slits | Y | - | 0.2mm | -12.5, +12.5mm ? | In/Out; optical switch | - | SLC2445 - UHV | 500 | -Y direction | +Y | -Y |
Slits | X | - | 5µm | ±1.20 mm ? | - | SLC2430 - UHV | 100 | Middle of stage | +X | -X |
Tests in B031 clean room used ASCII Terminal and MCSConfiguration tools. Software can be found at V:\CD\Motion Control\SmarACT software
NOTES:
Stage Moves according to beam co ordinate system.
-If logged in from MCSConfiguration tool, commands sent from ASCII Terminal do not work. You will need to power cycle the controller to re-establish communication. By doing so, your home position is lost and the stage will need to find reference again.
-By default the stage sets maximum closed loop frequency to 5000. This is too fast for the stage. Use CLF command to change this to appropriate value mentioned in the table above.
-Useful commands
Get System ID- Check if communication has been established. GSI
Set Closed Loop Max Frequency - Defines max Freq the positioner is driven when using closed loop commands. SCLF
Get Position- Returns current position. GP
Find reference Mark -"Finding Home" FRM. This command will behave differently based on the stage. While testing, X axis finds reference in the middle of the stage. Y axis finds reference at one end of the stage.
Get Physical Position Known- Returns 1 if home is not lost. GPPK. (Useful to know if power was lost but IOC was still alive)
Move Position Relative . MPR
Move Position Absolute. MPA
--When Y Axis FRM comoona dis set, the Axis is moved to
