How to use MKS mass flow controller (DPS)

Open the control panel on the web browser:

1. Connect power to the device:
   1. Connect power cord to 120V outlet 2PK102E2 2 (on east side of penetration 20-12)
2. If using PC96660 in 244, then the ethernet connection should be set up and working correctly. So move on to Step 3. If not then continue:
   1. Connect ethernet from MFC to computer
   2. Set up the ethernet port on your PC (Page 108-112 of manual). This should only have to be done once.
      1. From "Network and Sharing center", select the ethernet channel to open the LAN status
      2. Select properties
      3. Select Internet Protocol Version 4
      4. Select use IP address: 192.168.2.2 and subnet mask 255.255.255.0
      5. Select use the following DNS sever, but leave the entry empty
      6. Select OK to close the window
3. Open a web browser and go to 192.168.2.155

To set the flow rate:

1. Go to the "Plot" subpanel
2. Switch from "Analog" to "Digital" (above Flow Setpoint)
3. Enter a value between 0 and 1400
   1. Use the table below for reference values.
   2. Do not exceed 10 Torr pressure for He and Ar gas, or 5 Torr for H2 gas
4. Press "Set"

To change the gas species:

1. Go to the "Configuration" subpanel
2. Enter the password "config" and press "Change settings"
3. Go to the "Device" subpanel
4. Change the "Selected Gas", press set
5. Use the manual to learn how to add a new gas if your gas is not a listed option.

To monitor the flow rate setting:

1. Connect a voltmeter to the pig tails labeled "FLOW SIGNAL"
2. 0 V = stopped, 5V = Full scale flow rate

To use analog flow control:

1. Connect a 5 volt variable voltage source to the pig tails labeled "FLOW SETPOINT"
2. 0 V = stopped, 5V = Full scale flow rate

Approximate setpoints (in readout volts):

Picture of the mass flow controller and power supply:

Panel to change flow rate: