This procedure outlines how to use the mass flow controller using the ethernet control. This will eventually be integrated with Epics, making this procedure obsolete.
Step-by-step guide
Open the control panel on the web browser:
- Connect power to the device:
- Connect power cord to 120V outlet 2PK102E2 2 (on east side of penetration 20-12)
- If using PC96660 in 244, then the ethernet connection should be set up and working correctly. So move on to Step 3. If not then continue:
- Connect ethernet from MFC to computer
- Set up the ethernet port on your PC (Page 108-112 of manual). This should only have to be done once.
- From "Network and Sharing center", select the ethernet channel to open the LAN status
- Select properties
- Select Internet Protocol Version 4
- Select use IP address: 192.168.2.2 and subnet mask 255.255.255.0
- Select use the following DNS sever, but leave the entry empty
- Select OK to close the window
- Open a web browser and go to 192.168.2.155
To set the flow rate:
- Go to the "Plot" subpanel
- Switch from "Analog" to "Digital" (above Flow Setpoint)
- Enter a value between 0 and 1400
- Use the table below for reference values.
- Do not exceed 10 Torr pressure for He and Ar gas, or 5 Torr for H2 gas
- Press "Set"
To change the gas species:
- Go to the "Configuration" subpanel
- Enter the password "config" and press "Change settings"
- Go to the "Device" subpanel
- Change the "Selected Gas", press set
- Use the manual to learn how to add a new gas if your gas is not a listed option.
To monitor the flow rate setting:
- Connect a voltmeter to the pig tails labeled "FLOW SIGNAL"
- 0 V = stopped, 5V = Full scale flow rate
To use analog flow control:
- Connect a 5 volt variable voltage source to the pig tails labeled "FLOW SETPOINT"
- 0 V = stopped, 5V = Full scale flow rate
Approximate setpoints (in readout volts):
Gas | IP pressure | Flow rate (est.) | Input/Output voltage |
---|---|---|---|
Helium | 10 Torr | 840 | 3 V |
Helium | 5 Torr | 420 | 1.5 V |
Argon | 10 Torr | 265 | 0.95 V |
Hydrogen | 5 Torr | 580 | 2.9 V |
Picture of the mass flow controller and power supply:
Panel to change flow rate:
- You need to have admin access to the computer in order to set up the network settings the first time.
- Manual: https://www.mks.com/mam/celum/celum_assets/resources/GISeriesMFCs-MAN.pdf
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