How to use MKS mass flow controller (DPS)

Open the control panel on the web browser:

1. Confirm power is connected to the MFC device:
   1. Connect the power cord to 120V outlet 2PK102E2 2 (on east side of penetration 20-12)
2. You must use the Windows machine in B244 (PC96660) - or see info below
3. Open a web browser and go to 192.168.2.155

To set the flow rate (and start flowing gas):

1. Go to the "Plot" subpanel
2. Switch from "Analog" to "Digital" (above Flow Setpoint)
3. To start the flow or change the flow rate, Enter a value into the "Flow Setpoint" box
   1. Use the table below for reference values.
   2. Do not exceed 10 Torr pressure for He and Ar gas, or 5 Torr for H2 gas
4. Press "Submit" to commit the change
   
5. DO NOT USE THE "Operating Press" box!

Approximate setpoints (in readout volts):

To change the gas species:

1. Go to the "Device" subpanel
2. Change the "Selected Gas" (under GAS SETTINGS) to the gas you are using and press set
   1. If you do not see this option you need to add the configuration password,
      
      1. If you have only 4 tabs at the top of the window (like the screenshot to the right shows) then do these steps.
   2. Go to the "Configuration" subpanel
   3. Enter the password "config" and press "Change settings"
   4. Go back to Step 1
3. Use the manual to learn how to add a new gas if your gas is not a listed option.

It is possible to monitor the flow rate setting (but not required):

1. Connect a voltmeter to the pig tails labeled "FLOW SIGNAL"
2. 0 V = stopped, 5V = Full scale flow rate

If you want to use an analog flow control:

1. Connect a 5 volt variable voltage source to the pig tails labeled "FLOW SETPOINT"
2. 0 V = stopped, 5V = Full scale flow rate

To set up the MFC on a new device:

  If you want to use a different PC, the MFC must be connected to the ethernet port, and the network settings set up properly:

1. 1. Connect ethernet from MFC to computer
   2. Set up the ethernet port on your PC (Page 108-112 of manual). This should only have to be done once.
      1. From "Network and Sharing center", select the ethernet channel to open the LAN status
      2. Select properties
      3. Select Internet Protocol Version 4
      4. Select use IP address: 192.168.2.2 and subnet mask 255.255.255.0
      5. Select use the following DNS sever, but leave the entry empty
      6. Select OK to close the window

Picture of the mass flow controller and power supply:

Panel to change the flow setpoint: