Goal of this procedure: Enter oven mode and reach desired oven profile
Instructions: To keep track of changes to the procedure - copy this page, date it, and add execution notes in red. Remember to save changes.
Table of Contents:
NOTE - WORK IN PROGRESS!
Procedure
Checkout and setup
Procedure | Execution notes | |
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1 | Record goal density and helium buffer pressure | |
2 | Set 10 Torr gauge set points to plus and minus 1 Torr of desired pressure
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3 | Set the 1000 Torr gauge setpoint to 20 Torr | |
4 | Confirm helium gas bottle is connected to fill line 1, regulator set to 5-10 psig | |
5 | If using DPS, confirm it is operating nominally. |
Procedure for oven turn on
Procedure | Execution notes | |
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1 | Verify vacuum conditions approximately 1e-6 Torr or better - Record pressure | |
2 | Zero the 10 and 1000 Torr gauges | |
Purge fill line by running a small amount of He through the fill valve and then stopping and pumping out the IP - Record final pressure | ||
3 | Set EPS EXPERT Mode to be “ON” by turning the interlock key in the EPS box in Rack 20-27 in the gallery.
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4 | Unlock oven gate valves (switch to CAMAC mode) | |
5 | Open oven gate valves 3183 and 3187. (there might be a small amount of helium between the valves). Continue pump down to 10-6 Torr - Record pressure | |
6 | Close angle valve VV3201 isolating the plasma beamline from the plasma turbo | |