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Goal of this procedure: Enter oven mode and reach desired oven profile

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Table of Contents:


Procedure

Checkout and setup


Procedure Execution notes
1Record goal density and helium buffer pressure

2

Set 10 Torr gauge set points to plus and minus 1 Torr of desired pressure

    • Note: the hysteresis value is where the trip occurs, the lower value is where the fault will clear
 
3Set the 1000 Torr gauge setpoint to 20 Torr

4

Confirm helium gas bottle is connected to fill line 1, regulator set to 5-10 psig 
5If using DPS, confirm it is operating nominally.

Procedure for oven turn on


Procedure Execution notes
1Verify vacuum conditions approximately 1e-6 Torr or better - Record pressure

2

Zero the 10 and 1000 Torr gauges

 
3

Set EPS EXPERT Mode to be “ON” by turning the interlock key in the EPS box in Rack 20-27 in the gallery.

    • Note: EXPERT mode is “OFF” if the LED light is OFF and EXPERT mode is “ON” if the red light is ON)

4Unlock oven gate valves (switch to CAMAC mode) 
5Open oven gate valves 3183 and 3187. (there might be a small amount of helium between the valves). Continue pump down to 10-6 Torr - Record pressure
6

Close angle valve VV3201 isolating the plasma beamline from the plasma turbo













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