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E300

DescXPS ControllerMotor nameChannelPositionDesc. position
USHMXPS:LI20:MC03PB10 M2 Removal StageM13.5 mm / 44 mmin/out
Axicon VerticalXPS:LI20:MC04PB2 Lens VerticalM247.9 mmAxicon beam center overlaps with beam center
Axicon HorizontalXPS:LI20:MC04PB3 Lens HorizontalM34.899 mmAxicon beam center overlaps with beam center

EOS

DescXPS ControllerMotor nameChannelPositionDesc. position
EOS removalXPS:LI20:MC04PB4 EOS Assembly RemovalM47 mm/ 50mmin/out












Target assembly

DescXPS ControllerMotor nameChannelPositionDesc. position
Target Assembly VerticalXPS:LI20:MC05PB7 Target Mount VerticalM180Clear in combination with horizontal
Target Assembly HorizontalXPS:LI20:MC05PB8 Target Mount HorizontalM2-150Clear in combination with vertical








E320 assembly

DescXPS ControllerMotor nameChannelPositionDesc. position

Alignment Target Vertical

UP/DOWN

XPS:LI20:MC10PB11 SFQED Target VerticalM10/99

Home position, needed when inserting or retracting OAP assembly. Do not drive to home (0) when MO tower is in IN position.

/Clear position with and without OAP assembly. Moving assembly requires moving out of clear position.

MO Tower Mover IN/OUTXPS:LI20:MC10PB12 SFQED Tower MoverM2-98.1/0

IN position to look at focal spot.


Clear (retracted), also home position, needs to be done before retracting SFQED assembly

OAP Assembly IN/OUTXPS:LI20:MC10PB16 SFQED Assembly RemovalM3118/0

IN position to focus main beam.

Clear (retracted), also home positions, needs MO Tower to move out first, also needs Alignment target to move upwards first

Elliptical mirror/M3 IN/OUTXPS:LI20:MC10PB17 Elliptical mirror moverM4Positive limit switch/negative limit switch

Out position. Configuration is 'SetCurrentPositionAsHome',so need to drive all the way to positive limit switch to ensure driven out.

In position. Drive all the way to negative end for IN position.

PB18 Focus Imaging VerticalXPS:LI20:MC10PB18 Focus Imaging VerticalM50Home at current position (0). Motor should not be touched or moved, should be clear in any case.

Safely retracting E320 assembly and setting up to clear e-beam/laser will be:

  • Drive PB12 SFQED Tower Mover to 0 (home)
  • Drive PB11 SFQED Target Vertical to 0 (home)
  • Drive PB16 SFQED Assembly Removal to 0 (home)
  • Drive PB11 SFQED Target Vertical to 99
  • Drive PB17 Elliptical mirror mover to most positive end
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