Page History

Optics

Axis

encoder

Repeatability

Range

MPS switch

Limit switch

Actuator

CLF
CLF Direction

FRM

Forward Move Direction

Reverse Move direction

Beam ON Position

Slits

Y

-

0.2mm

-1215.5, +1215.5mm ?

In/Out; optical switch

-

SLC2445 - UHV

500-Y direction

Mid travel. No need to Set position

+Y

-Y

N/A

Slits

X

-

5µm

2.2mm = ±1.20 mm

-

SLC2430 - UHV

100

-X End Stop.

Set position here to -1.2mm

+X

-X

-0.7mm (with 0 in middle of travel range)