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X-Y quality check for optical metrology measurements ---------------------------------------------------------------------------------------------------------------------------- segm: S1 S2 dS1 dS2 L1 L2 dL1 dL2 angle(deg) D1 D2 dD d(dS) d(dL) ---------------------------------------------------------------------------------------------------------------------------- segm: 0 36699 36691 -477 -485 39689 40683 -558 436 0.68576 54051 54789 -737 8 -994 segm: 1 36702 36696 -483 -489 39683 39678 439 434 0.70171 54044 54063 -19 6 5 segm: 2 36716 36681 -72 -107 39693 39650 70 27 0.12926 54018 54068 -49 35 43 segm: 3 36690 36705 -405 -390 39713 39684 390 361 0.57368 54070 54058 11 -15 29 segm: 4 36718 36692 388 362 39723 39746 -323 -300 0.54072 54121 54069 51 26 -23 segm: 5 36702 36703 332 333 39721 39701 -306 -326 0.47973 54069 54083 -13 -1 20 segm: 6 36599 36701 594 696 39702 39700 -631 -633 0.93077 54012 54065 -53 -102 2 segm: 7 36664 36664 369 369 39714 39708 -343 -349 0.53238 54046 54054 -7 0 6 segm: 8 36677 36713 -412 -376 39744 39682 420 358 0.56842 54092 54055 36 -36 62 segm: 9 36695 36728 -338 -305 39744 39719 319 294 0.46362 54104 54090 13 -33 25 segm:10 36702 36736 -263 -229 39708 39568 371 231 0.35558 54087 53980 106 -34 140 segm:11 36725 36688 -614 -651 39683 39703 596 616 0.91292 54086 54055 30 37 -20 segm:12 36706 36692 476 462 39668 39671 -429 -426 0.67736 54050 54040 10 14 -3 segm:13 36672 36714 523 565 39697 39708 -512 -501 0.78501 54064 54069 -5 -42 -11 segm:14 36705 36692 538 525 39731 39700 -479 -510 0.76673 54078 54082 -3 13 31 segm:15 36696 36695 473 472 39712 39699 -421 -434 0.68179 54076 54062 13 1 13 ---------------------------------------------------------------------------------------------------------------------------- WARNING segm 0: |-737| > 60.0 WARNING segm 0: |-994| > 60.0 WARNING segm 6: |-102| > 60.0 WARNING segm 8: |62| > 60.0 WARNING segm 10: |106| > 60.0 WARNING segm 10: |140| > 60.0 Z quality check for optical metrology measurements ----------------------------------------------------------------------------------------------------------------------------------------- segm: SA LA XSize YSize dZS1 dZS2 dZL1 dZL2 dZSA dZLA ddZS ddZL dZX dZY angXZ(deg) angYZ(deg) dz3(um) ----------------------------------------------------------------------------------------------------------------------------------------- segm: 0 36695 40186 36695 40186 44 248 54 258 146 156 -204 -204 146 156 0.22796 0.22242 -202.642 segm: 1 36699 39680 36699 39680 85 115 -30 0 100 -15 -30 -30 100 -15 0.15612 -0.02166 -30.010 segm: 2 36698 39671 36698 39671 146 274 23 151 210 87 -128 -128 210 87 0.32786 0.12565 -128.163 segm: 3 36697 39698 36697 39698 171 109 1 -61 140 -30 62 62 140 -30 0.21858 -0.04330 62.067 segm: 4 36705 39734 39734 36705 8 89 26 107 48 66 -81 -81 66 48 0.09589 0.07571 80.991 segm: 5 36702 39711 39711 36702 -71 -149 204 126 -110 165 78 78 165 -110 0.23806 -0.17172 -77.894 segm: 6 36650 39701 39701 36650 0 14 24 38 7 31 -14 -14 31 7 0.04474 0.01094 14.000 segm: 7 36664 39711 39711 36664 -14 -42 123 95 -28 109 28 28 109 -28 0.15727 -0.04376 -27.981 segm: 8 36695 39713 36695 39713 235 111 0 -124 173 -62 124 124 173 -62 0.27012 -0.08945 124.224 segm: 9 36711 39731 36711 39731 84 152 -20 48 118 14 -68 -68 118 14 0.18416 0.02019 -67.912 segm:10 36719 39638 36719 39638 76 220 -241 -97 148 -169 -144 -144 148 -169 0.23094 -0.24428 -143.077 segm:11 36706 39693 36706 39693 82 103 -2 19 92 8 -21 -21 92 8 0.14438 0.01227 -21.083 segm:12 36699 39669 39669 36699 36 199 79 242 117 160 -163 -163 160 117 0.23181 0.18344 163.008 segm:13 36693 39702 39702 36693 75 42 85 52 58 68 33 33 68 58 0.09885 0.09135 -33.110 segm:14 36698 39715 39715 36698 169 165 160 156 167 158 4 4 158 167 0.22794 0.26073 -3.817 segm:15 36695 39705 39705 36695 96 65 177 146 80 161 31 31 161 80 0.23305 0.12569 -30.939 ----------------------------------------------------------------------------------------------------------------------------------------- WARNING segm 0: |-202.6| > 100.0 WARNING segm 2: |-128.2| > 100.0 WARNING segm 8: |124.2| > 100.0 WARNING segm 10: |-143.1| > 100.0 WARNING segm 12: |163.0| > 100.0 |
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Corrected points:
Quad 0
point X Y Z
#4 95420 -4982 158686
4 95420 -3988 158686
Quad 1
point X Y Z
#9 15847 43156 158511
9 15847 43054 158511
Quad 2
point X Y Z
#12 58727 123727 158774
12 58727 123587 158774
X-Y quality check for optical metrology measurements
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segm: S1 S2 dS1 dS2 L1 L2 dL1 dL2 angle(deg) D1 D2 dD d(dS) d(dL)
----------------------------------------------------------------------------------------------------------------------------
segm: 0 36699 36691 -477 -485 39689 39689 436 436 0.69435 54051 54063 -11 8 0
segm: 1 36702 36696 -483 -489 39683 39678 439 434 0.70171 54044 54063 -19 6 5
segm: 2 36716 36681 -72 -107 39693 39650 70 27 0.12926 54018 54068 -49 35 43
segm: 3 36690 36705 -405 -390 39713 39684 390 361 0.57368 54070 54058 11 -15 29
segm: 4 36718 36692 388 362 39723 39746 -323 -300 0.54072 54121 54069 51 26 -23
segm: 5 36702 36703 332 333 39721 39701 -306 -326 0.47973 54069 54083 -13 -1 20
segm: 6 36701 36701 696 696 39702 39700 -631 -633 1.00435 54082 54065 16 0 2
segm: 7 36664 36664 369 369 39714 39708 -343 -349 0.53238 54046 54054 -7 0 6
segm: 8 36677 36713 -412 -376 39744 39682 420 358 0.56842 54092 54055 36 -36 62
segm: 9 36695 36728 -338 -305 39744 39719 319 294 0.46362 54104 54090 13 -33 25
segm:10 36702 36736 -263 -229 39708 39708 231 231 0.35496 54087 54082 4 -34 0
segm:11 36725 36688 -614 -651 39683 39703 596 616 0.91292 54086 54055 30 37 -20
segm:12 36706 36692 476 462 39668 39671 -429 -426 0.67736 54050 54040 10 14 -3
segm:13 36672 36714 523 565 39697 39708 -512 -501 0.78501 54064 54069 -5 -42 -11
segm:14 36705 36692 538 525 39731 39700 -479 -510 0.76673 54078 54082 -3 13 31
segm:15 36696 36695 473 472 39712 39699 -421 -434 0.68179 54076 54062 13 1 13
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WARNING segm 8: |62| > 60.0
Z quality check for optical metrology measurements
-----------------------------------------------------------------------------------------------------------------------------------------
segm: SA LA XSize YSize dZS1 dZS2 dZL1 dZL2 dZSA dZLA ddZS ddZL dZX dZY angXZ(deg) angYZ(deg) dz3(um)
-----------------------------------------------------------------------------------------------------------------------------------------
segm: 0 36695 39689 36695 39689 44 248 54 258 146 156 -204 -204 146 156 0.22796 0.22520 -204.009
segm: 1 36699 39680 36699 39680 85 115 -30 0 100 -15 -30 -30 100 -15 0.15612 -0.02166 -30.010
segm: 2 36698 39671 36698 39671 146 274 23 151 210 87 -128 -128 210 87 0.32786 0.12565 -128.163
segm: 3 36697 39698 36697 39698 171 109 1 -61 140 -30 62 62 140 -30 0.21858 -0.04330 62.067
segm: 4 36705 39734 39734 36705 8 89 26 107 48 66 -81 -81 66 48 0.09589 0.07571 80.991
segm: 5 36702 39711 39711 36702 -71 -149 204 126 -110 165 78 78 165 -110 0.23806 -0.17172 -77.894
segm: 6 36701 39701 39701 36701 0 14 24 38 7 31 -14 -14 31 7 0.04474 0.01093 14.001
segm: 7 36664 39711 39711 36664 -14 -42 123 95 -28 109 28 28 109 -28 0.15727 -0.04376 -27.981
segm: 8 36695 39713 36695 39713 235 111 0 -124 173 -62 124 124 173 -62 0.27012 -0.08945 124.224
segm: 9 36711 39731 36711 39731 84 152 -20 48 118 14 -68 -68 118 14 0.18416 0.02019 -67.912
segm:10 36719 39708 36719 39708 76 220 -241 -97 148 -169 -144 -144 148 -169 0.23094 -0.24385 -143.925
segm:11 36706 39693 36706 39693 82 103 -2 19 92 8 -21 -21 92 8 0.14438 0.01227 -21.083
segm:12 36699 39669 39669 36699 36 199 79 242 117 160 -163 -163 160 117 0.23181 0.18344 163.008
segm:13 36693 39702 39702 36693 75 42 85 52 58 68 33 33 68 58 0.09885 0.09135 -33.110
segm:14 36698 39715 39715 36698 169 165 160 156 167 158 4 4 158 167 0.22794 0.26073 -3.817
segm:15 36695 39705 39705 36695 96 65 177 146 80 161 31 31 161 80 0.23305 0.12569 -30.939
-----------------------------------------------------------------------------------------------------------------------------------------
WARNING segm 0: |-204.0| > 100.0
WARNING segm 2: |-128.2| > 100.0
WARNING segm 8: |124.2| > 100.0
WARNING segm 10: |-143.9| > 100.0
WARNING segm 12: |163.0| > 100.0
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References
- EPIX10KA
- Jungfrau and Epix10ka Calibration
- Detector alignment tool
- /reg/g/psdm/detector/alignment/epix10ka2m/calib-mfx-epix10ka2m-01-2018-11-15
Overview
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