Optics | Axis | encoder | Repeatability | Range | MPS switch | Limit switch | Actuator | CLF | CLF Direction | Forward Move Direction | Reverse Move direction | Beam ON Position |
Slits | Y | - | 0.2mm | -12.5, +12.5mm ? | In/Out; optical switch | - | SLC2445 - UHV | 500 | -Y direction | +Y | -Y | N/A |
Slits | X | - | 5µm | 2.2mm = ±1. |
20 mm | - | SLC2430 - UHV | 100 |
-X End Stop | +X | -X | -0.7mm (with 0 in middle of travel range) |
Tests in B031 clean room used ASCII Terminal and MCSConfiguration tools. Software can be found at V:\CD\Motion Control\SmarACT software
...
Get Physical Position Known- Returns 1 if home is not lost. GPPK. (Useful to know if power was lost but IOC was still alive) (Doesn't seem to work)
Find reference Mark -"Finding Home" FRM. This command will behave differently based on the stage.
...
GP0 response P0,-27907
So we hit hard Stop.
Total Range is ~2.2mm. Looks like FRM0,0,2000,1 command left axis at -X end of travel and set that position to -28636.!!
Try again.
Disconnect, close app, power cycle controller
Test communication by using GSI command
Set closed loop max freq
SCLF0,100 response E0,0
SCLF2,500 response E2,0
GP0 response P0,-40
FRM0,0,2000,0 response E0,0
GP0 response P0,643
MPR0,2000000,2000 response E0,0
GP0 response P0,2000525
MPR0,1000000,2000 response E0,0
GP0 response P0,2206622
Reached End Stop
MPR0,-25000000,2000 response E0,0
GP0 response P0,516
FRM0,0,2000,1
GP0 response 177
FRM0,0,2000,1
GP0 response 175
FRM0,0,2000,1
GP0 response 223
## FRM0,0 makes the axis move in Positive direction , see ref mark, move in negative direction and stop at end stop. At this point, Use SP0 to set this value to -1.2mm
