E300
| Desc | XPS Controller | Motor name | Channel | Position | Desc. position |
|---|---|---|---|---|---|
| USHM | XPS:LI20:MC03 | PB10 M2 Removal Stage | M1 | 3.5 mm / 44 mm | in/out |
| Axicon Vertical | XPS:LI20:MC04 | PB2 Lens Vertical | M2 | 47.9 mm | Axicon beam center overlaps with beam center |
| Axicon Horizontal | XPS:LI20:MC04 | PB3 Lens Horizontal | M3 | 4.899 mm | Axicon beam center overlaps with beam center |
EOS
| Desc | XPS Controller | Motor name | Channel | Position | Desc. position |
|---|---|---|---|---|---|
| EOS removal | XPS:LI20:MC04 | PB4 EOS Assembly Removal | M4 | 7 mm/ 50mm | in/out |
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