Metrology data
Quality check
optical_metrology_check 2021-01-07-epix10kaquad1-mec-metrology.txt
X-Y quality check for optical metrology measurements ---------------------------------------------------------------------------------------------------------------------------- segm: S1 S2 dS1 dS2 L1 L2 dL1 dL2 angle(deg) D1 D2 dD d(dS) d(dL) ---------------------------------------------------------------------------------------------------------------------------- segm: 0 38010 38014 3 7 40992 41003 -12 -1 0.00699 55906 55909 -3 -4 -11 segm: 1 38009 38018 -29 -20 41009 41009 29 29 -0.03423 55922 55912 9 -9 0 segm: 2 38012 38019 24 31 41012 41019 -24 -17 0.03842 55927 55920 7 -7 -7 segm: 3 38012 38010 121 119 41021 41009 -107 -119 0.16763 55919 55921 -2 2 12 ---------------------------------------------------------------------------------------------------------------------------- Z quality check for optical metrology measurements ----------------------------------------------------------------------------------------------------------------------------------------- segm: SA LA XSize YSize dZS1 dZS2 dZL1 dZL2 dZSA dZLA ddZS ddZL dZX dZY angXZ(deg) angYZ(deg) dz3(um) ----------------------------------------------------------------------------------------------------------------------------------------- segm: 0 38012 40997 40997 38012 -154 -176 103 81 -165 92 22 22 92 -165 0.12857 -0.24870 -22.011 segm: 1 38013 41009 41009 38013 -52 -46 31 37 -49 34 -6 -6 34 -49 0.04750 -0.07386 6.012 segm: 2 38015 41015 41015 38015 -90 -124 18 -16 -107 1 34 34 1 -107 0.00140 -0.16127 -33.986 segm: 3 38011 41015 41015 38011 -93 -87 55 61 -90 58 -6 -6 58 -90 0.08102 -0.13566 6.011 -----------------------------------------------------------------------------------------------------------------------------------------
Geometry file
- /reg/g/psdm/detector/alignment/epix10kaquad/2021-01-07-epix10kaquad1-mec/2021-01-07-epix10kaquad1-mec-geometry.txt
Validation on data
References
Overview
Content Tools