Metrology data

Measurement map

Quality check

Quality check for raw metrology data 
X-Y quality check for optical metrology measurements 
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segm:        S1      S2     dS1     dS2        L1      L2     dL1     dL2    angle(deg)   D1      D2      dD   d(dS)   d(dL)
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segm: 0   36685   36672     460     447    -39671  -39658     422     435    0.65506   54049   54035      14      13     -13
segm: 1   36679   36691     291     303    -39695  -39679     292     308    0.42877   54058   54065      -7     -12     -16
segm: 2   36674   36680     106     112    -39659  -39671     127     115    0.15745   54039   54038       1      -6      12
segm: 3   36674   36681     188     195    -39690  -39677     195     208    0.27649   54058   54056       2      -7     -13
segm: 4  -36700  -36658    -500    -458    -39695  -39687     405     413    0.69142   54072   54054      17     -42      -8
segm: 5  -36680  -36673     -64     -57    -39662  -39680      48      30    0.08738   54039   54044      -4      -7      18
segm: 6  -36689  -36666    -337    -314    -39683  -39677     286     292    0.46999   54045   54060     -15     -23      -6
segm: 7  -36649  -36674    -263    -288    -39666  -39685     227     208    0.39785   54049   54039       9      25      19
segm: 8  -36674  -36681    -290    -297     39673   39673    -279    -279    0.42387   54061   54037      24       7       0
segm: 9  -36687  -36668    -235    -216     39672   39683    -235    -224    0.32563   54055   54049       5     -19     -11
segm:10  -36699  -36672    -210    -183     39671   39668    -211    -214    0.28381   54040   54056     -15     -27       3
segm:11  -36672  -36675     -63     -66     39676   39673     -78     -81    0.09315   54043   54042       0       3       3
segm:12   36669   36694     115     140     39695   39677     -98    -116    0.18407   54049   54061     -11     -25      18
segm:13   36652   36691     241     280     39707   39691    -220    -236    0.37596   54055   54070     -14     -39      16
segm:14   36669   36681     637     649     39683   39672    -542    -553    0.92843   54072   54031      40     -12      11
segm:15   36678   36671     420     413     39670   39668    -382    -384    0.60155   54029   54029       0       7       2
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Z quality check for optical metrology measurements 
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segm:        SA      LA   XSize   YSize    dZS1  dZS2  dZL1  dZL2    dZSA  dZLA  ddZS  ddZL     dZX   dZY   angXZ(deg) angYZ(deg) dz3(um)
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segm: 0   36678  -39664   36678   39664     573   889   868  1184     731  1026  -316  -316     731  1026   1.14175    1.48174    316.374
segm: 1   36685  -39687   36685   39687     739   838   970  1069     788  1019   -99   -99     788  1019   1.23131    1.47152     99.095
segm: 2   36677  -39665   36677   39665     843   896   935   988     869   961   -53   -53     869   961   1.35805    1.38861     52.551
segm: 3   36677  -39683   36677   39683     904   897  1144  1137     900  1140     7     7     900  1140   1.40643    1.64622     -6.796
segm: 4  -36679  -39691   39691   36679     885  1119  -977  -743    1002  -860  -234  -234    -860  1002  -1.24126    1.56482    234.662
segm: 5  -36676  -39671   39671   36676     850  1062  -948  -736     956  -842  -212  -212    -842   956  -1.21590    1.49312    212.475
segm: 6  -36677  -39680   39680   36677     972  1033  -910  -849    1002  -879   -61   -61    -879  1002  -1.26974    1.56567     61.429
segm: 7  -36661  -39675   39675   36661    1266  1102  -938 -1102    1184 -1020   164   164   -1020  1184  -1.47267    1.84975   -164.262
segm: 8  -36677   39673   36677   39673    -901  -858 -1120 -1077    -879 -1098   -43   -43    -879 -1098  -1.37365   -1.58605     43.143
segm: 9  -36677   39677   36677   39677    -889  -835 -1165 -1111    -862 -1138   -54   -54    -862 -1138  -1.34633   -1.64286     53.818
segm:10  -36685   39669   36685   39669    -766  -844  -957 -1035    -805  -996    78    78    -805  -996  -1.25706   -1.43825    -78.599
segm:11  -36673   39674   36673   39674    -774  -849  -953 -1028    -811  -990    75    75    -811  -990  -1.26762   -1.43013    -74.970
segm:12   36681   39686   39686   36681    -955  -791   761   925    -873   843  -164  -164     843  -873   1.21688   -1.36335    164.910
segm:13   36671   39699   39699   36671   -1117 -1142   804   779   -1129   791    25    25     791 -1129   1.14218   -1.76418    -23.474
segm:14   36675   39677   39677   36675    -946 -1047   813   712    -996   762   101   101     762  -996   1.10094   -1.55641   -100.410
segm:15   36674   39669   39669   36674    -929    64  -269   724    -432   227  -993  -993     227  -432   0.32859   -0.67565    992.468
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  WARNING segm  0:  |316.4| > 100.0
  WARNING segm  4:  |234.7| > 100.0
  WARNING segm  5:  |212.5| > 100.0
  WARNING segm  7:  |-164.3| > 100.0
  WARNING segm 12:  |164.9| > 100.0
  WARNING segm 14:  |-100.4| > 100.0
  WARNING segm 15:  |992.5| > 100.0

 

Test on data

 

  • Use 2020-09-10-geometry-epix10ka2m.1-v1.txt
    with center offset: IP 0 CAMERA 0 250 350 -118000 90 0 0 0.00000 0.00000 0.00000
  • nda-mfxc00118-r0183-silver-behenate-max.txt
  • nda-mfxc00118-r0184-silver-behenate-max.txt
  • nda-mfxc00118-r0185-silver-behenate-max.txt

 

  • run 214 lysozyme - max
  • run 224 silver-behenate - max
  • run 224 silver-behenate - mean

References

 

 

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