Readiness checklist

• All chamber doors must be closed
• All chamber flanges must be in place (no obvious opening)
• TC1:VGC:11, TC1:VGC:12, TC1-VGC-01, TC1-VGC-02, TC1-VGC-03, TC1-VGC-04 must be closed
• MEZ-PMF-01 EBARA A70, MEZ-PMF-02 EBARA A70 must be off (if faulted, press RESET)
• TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed
• MEZ-GPI-02 must display ~ 6.5e+02 torr (if lower, open MEZ:VGC:18 until restored, then close)
• TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed and allowed to open
• The gas ballast control knob of the scroll pump should be set to level 0
• Turbo pump should be at "Full Speed" (if not follow Turbo pump startup procedure below)

Pumpdown procedure

• Press OPN on TC1-VGC-04
• Press RUN on MEZ-PMF-01 EBARA A70
• Press OPN on MEZ:VGC:17 (wait a few seconds if MEZ:VGC:17 cannot open)
• Press RUN on MEZ-PMF-02 EBARA A70
• Press OPN on MEZ-VIC-19 (wait a few seconds if MEZ-VIC-19 cannot open)
• Wait until MEC:TC1:GPI:01 drops below 5.0e-02 torr
• Press OPN on TC1-VGC-02
• Press CLS on MEZ:VGC:17
• Press STP on MEZ-PMF-01 EBARA A70
• Press CLS on MEZ-VIC-19
• Press STP on MEZ-PMF-02 EBARA A70
• Press OPN on MEZ:VGC:18
• Wait until MEZ-GPI-02 passes above ~ 6.5e+02 torr
• Press CLS on MEZ:VGC:18

If something goes off track during this procedure, initiate the venting procedure and check for leaks (flanges, virtual leaks, waterlines, etc).

Turbo pump startup

• Open mechome, go to the tab "User Devices", open the panel "User Sentry PDU"
• Turn On "Roughing pump PTM 02 (turbo 2)"
• Wait until SEW:GPI:04 drops below 1.0e-02 torr
• Press OPN on SEW-VGC-15
• Press RUN next to the turbo pump logo
• Wait until turbo pump displays "Full Speed"

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