Intro: this doc will walk you through starting up the RGA, gathering data, and sending it off for qualification.
It assumes you are using an MKS brand RGA.
(For information on how to use the carts themselves, see Vacuum Cart Operation page)
highest pressure for RGA use (@ room temp): 7e-6 Torr
connection issues? see Computer Recognition of RGA
Gathering data:
double check:
- valves between RGA and turbo are open
- pressure is below 7e-6 torr
software settings:
open MKS Process Eye
filament on (red means on)
Multiplier 3
(w/ the lowest pressure option in the drop-down menu)
accuracy 6
saving data
to prevent the computer falling asleep: open an image (any image) and put it on slideshow
(prevent sleep because sometimes when the computer it's loses its connection to the RGA in sleep)
*insert video of RGA startup*
Email data to Peter Stefan (CC Brady Robertson and Cynthia Melendrez) for official qualification judgement:
- The pressure that the cold cathode gauge reads as data collection stops.
- The data file. Found here:
- Cart number
Qualification: Always go through Peter Stefan.
He is the official arbiter of chamber qualification, and he must have the final say.
You must send Peter the RGA data file (on electron multiplier mode and accuracy 6) along with a CCG pressure reading (taken during data collection).
If you do not do this, the chamber is not considered qualified from an administrative controls standpoint, and you will have bad luck for seven years.
documents: