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Vacuum System Hardware
Interlocking and Monitoring Hardware
- Allen-Bradley ControlLogix 5000 Series
Gate Valves
- VAT Series 48 (where RF shield is required)
- VAT Series 47 (where RF shield is not required)
- SLAC 233-808, VAT Valve Local Controller (J-Box)
- SLAC 380-210, Allen-Bradley PLC Two Valve Valve Controller
- SD-380-210-00 Schematic (PDF)
Gauges
- MKS 422 Cold Cathode Gauge
- MKS 317 Ehnanced Convection Pirani
- Helix / Granville-Phillips Bayard-Alpert Gauges
Gauge Controller
- Helix / Granville-Phillips 307
Ion Pumps
- Noble Diode type pumps are recommended. Pumps must have StarCell connector.
Ion Pump Controller
- Gamma Digitel Multiple Pump Controller
Residual Gas Analyzer
- MKS Microvision2 RGA
- Using Virtual RGA Systems SP104017.100
- Microvision2 Hardware Manual - SP101015 102
- Process Eye Professional v5 Recipe Wizard Manual SP104009.100
- MV2_EV2 Getting Started Guide - SP106003 100
- Process Eye Pro V5 7 User Manual - SP104021 102
- ASCII Protocol User Manual SP1040016.102
- Cpp Examples