Matt Hayes, 8/14/2020
SC1 PUMP DOWN:
- Wipe down SC1 Chamber door sealing surface and ensure no wires or cables are across the seal.
- Close SC1 Chamber Door and secure all door latches.
- Close Vent Valves SC1-VCC-01 and -02
- OPEN Foreline Valves SC1-VIC-04, then -05, then -01.
- OPEN Isolation Valve above SC1-PTM-01.
- WAIT for chamber pressure to reach at least 5x10-1 torr on SC1-GPI-01.
- START Turbos SC1-PTM-01, -02, and -03. (Note, -02 is actually two turbos)
- WAIT for Turbos to reach full speed.
- ENABLE Cold Cathode Gauge SC1-GCC-01.
- WAIT for vacuum pressure to reach at least 5x10-6 torr.
- Continue with operations.
SC1 VENT:
- Loosen and unlatch the SC1 Chamber Door.
- STOP Turbos SC1-PTM-01, -02, and -03. (Note, -02 is actually two turbos)
- CLOSE Foreline Valves SC1-VIC-04, then -03, then -01.
- CLOSE Isolation Valve above SC1-PTM-01.
- DISABLE Cold Cathode Gauge SC1-GCC-01.
- WAIT at least 15 minutes for Turbos to slow down.
- OPEN only Vent Valve SC1-VCC-01 for a few seconds, then CLOSE it.
- OPEN only Vent Valve SC1-VCC-02 for a second, then CLOSE it.
- Wait about 1 minute.
- Repeat steps 7, 8, and 9, six (6) times.
- OPEN only Vent Valve SC1-VCC-01, leave it open.
- OPEN only Vent Valve SC1-VCC-02 for a second, then CLOSE it.
- Wait about 1 minute.
- Repeat steps 11, 12, and 13, six (6) times.
- OPEN both Vent Valves SC1-VCC-01 and -02, leave open.
- WAIT for chamber pressure to reach ~ 760 torr on SC1-GPI-01 and for chamber door to open.
- Continue with operations.
SC2 PUMP DOWN:
1- Wipe down SC2 Chamber door sealing surface and ensure no wires or cables are across the seal.
2- Close SC2 Chamber Door and secure all door latches.
3- Close Vent Valves SC2-VCC-01 and -02
4- OPEN Foreline Valves SC2-VIC-01, then -03.
5- WAIT for chamber pressure to reach at least 5x10-1 torr on SC2-GPI-01.
6- START Turbos SC1-PTM-01, -02. (Note, -02 is actually two turbos)
7- WAIT for Turbos to reach full speed.
8- ENABLE Cold Cathode Gauge SC2-GCC-01.
9- WAIT for vacuum pressure to reach at least 5x10-6 torr.
10- Continue with operations.
SC2 VENT:
1- Loosen and unlatch the SC2 Chamber Door.
2- STOP Turbos SC2-PTM-01, -02. (Note, -02 is actually two turbos)
3- CLOSE Foreline Valves SC2-VIC-01, then -03.
4- DISABLE Cold Cathode Gauge SC2-GCC-01.
5- WAIT at least 15 minutes for Turbos to slow down.
6- OPEN only Vent Valve SC2-VCC-01 for a few seconds, then CLOSE it.
7- OPEN only Vent Valve SC2-VCC-02 for a second, then CLOSE it.
8- Wait about 1 minute.
9- Repeat steps 7, 8, and 9, six (6) times.
10- OPEN only Vent Valve SC2-VCC-01, leave it open.
11- OPEN only Vent Valve SC2-VCC-02 for a second, then CLOSE it.
12- Wait about 1 minute.
13- Repeat steps 11, 12, and 13, six (6) times.
14- OPEN both Vent Valves SC2-VCC-01 and -02, leave open.
15- WAIT for chamber pressure to reach ~ 760 torr on SC2-GPI-01 and for chamber door to open.
16- Continue with operations.
SC3/DSD PUMP DOWN:
1- Wipe down SC3 Chamber door sealing surface and ensure no wires or cables are across the seal.
2- Close SC3 Chamber Door and secure all door latches.
3- Close Vent Valves SC3-VCC-01 and -02, and DSD-VCC-01 and -02,
4- OPEN Foreline Valves SC3-VIC-01, then -03, then -02, then DSD-VIC-01.
5- WAIT for chamber pressure to reach at least 5x10-1 torr on SC3-GPI-01 and DSD-GPI-01.
6- START Turbos SC3-PTM-01, -02, -03, and DSD-PTM-01.
7- WAIT for Turbos to reach full speed.
8- ENABLE Cold Cathode Gauge SC3-GCC-01 and DSD-GCC-01.
9- WAIT for vacuum pressure to reach at least 5x10-6 torr.
10- Continue with operations.
SC3/DSD VENT:
1- Loosen and unlatch the SC3 Chamber Door.
2- STOP Turbos SC3-PTM-01, -02, -03, and DSD-PTM-01.
3- CLOSE Foreline Valves SC3-VIC-01, then -03, then -02, then DSD-VIC-01.
4- DISABLE Cold Cathode Gauge SC3-GCC-01 and DSD-GCC-01.
5- WAIT at least 15 minutes for Turbos to slow down.
6- OPEN only Vent Valve SC3-VCC-01 for a few seconds, then CLOSE it.
7- OPEN only Vent Valve SC3-VCC-02 for a second, then CLOSE it.
8- Wait about 1 minute.
9- Repeat steps 7, 8, and 9, six (6) times.
10- OPEN only Vent Valve SC3-VCC-01, leave it open.
11- OPEN only Vent Valve SC3-VCC-02 for a second, then CLOSE it.
12- Wait about 1 minute.
13- Repeat steps 11, 12, and 13, six (6) times.
14- OPEN Vent Valves SC3-VCC-01 and -02, and DSD-VCC-01, and 02, leave open.
15- WAIT for chamber pressure to reach ~ 760 torr on SC3-GPI-01 and for chamber door to open.
16- Continue with operations.