Matt Hayes, 8/14/2020

SC1 PUMP DOWN:

  1. Wipe down SC1 Chamber door sealing surface and ensure no wires or cables are across the seal.
  2. Close SC1 Chamber Door and secure all door latches.
  3. Close Vent Valves SC1-VCC-01 and -02
  4. OPEN Foreline Valves SC1-VIC-04, then -05, then -01.
  5. OPEN Isolation Valve above SC1-PTM-01. 
  6. WAIT for chamber pressure to reach at least 5x10-1 torr on SC1-GPI-01.
  7. START Turbos SC1-PTM-01, -02, and -03. (Note, -02 is actually two turbos)
  8. WAIT for Turbos to reach full speed.
  9. ENABLE Cold Cathode Gauge SC1-GCC-01.
  10. WAIT for vacuum pressure to reach at least 5x10-6 torr.
  11. Continue with operations.


SC1 VENT:

  1. Loosen and unlatch the SC1 Chamber Door.
  2. STOP Turbos SC1-PTM-01, -02, and -03. (Note, -02 is actually two turbos)
  3. CLOSE Foreline Valves SC1-VIC-04, then -03, then -01.
  4. CLOSE Isolation Valve above SC1-PTM-01. 
  5. DISABLE Cold Cathode Gauge SC1-GCC-01.
  6. WAIT at least 15 minutes for Turbos to slow down.
  7. OPEN only Vent Valve SC1-VCC-01 for a few seconds, then CLOSE it.
  8. OPEN only Vent Valve SC1-VCC-02 for a second, then CLOSE it.
  9. Wait about 1 minute.
  10. Repeat steps 7, 8, and 9, six (6) times.
  11. OPEN only Vent Valve SC1-VCC-01, leave it open.
  12. OPEN only Vent Valve SC1-VCC-02 for a second, then CLOSE it.
  13. Wait about 1 minute.
  14. Repeat steps 11, 12, and 13, six (6) times.
  15. OPEN both Vent Valves SC1-VCC-01 and -02, leave open.
  16. WAIT for chamber pressure to reach ~ 760 torr on SC1-GPI-01 and for chamber door to open.
  17. Continue with operations.

                                               

SC2 PUMP DOWN:

1- Wipe down SC2 Chamber door sealing surface and ensure no wires or cables are across the seal.

2- Close SC2 Chamber Door and secure all door latches.

3- Close Vent Valves SC2-VCC-01 and -02

4- OPEN Foreline Valves SC2-VIC-01, then -03.

5- WAIT for chamber pressure to reach at least 5x10-1 torr on SC2-GPI-01.

6- START Turbos SC1-PTM-01, -02. (Note, -02 is actually two turbos)

7- WAIT for Turbos to reach full speed.

8- ENABLE Cold Cathode Gauge SC2-GCC-01.

9- WAIT for vacuum pressure to reach at least 5x10-6 torr.

10- Continue with operations.

SC2 VENT:

1- Loosen and unlatch the SC2 Chamber Door.

2- STOP Turbos SC2-PTM-01, -02. (Note, -02 is actually two turbos)

3- CLOSE Foreline Valves SC2-VIC-01, then -03.

4- DISABLE Cold Cathode Gauge SC2-GCC-01.

5- WAIT at least 15 minutes for Turbos to slow down.

6- OPEN only Vent Valve SC2-VCC-01 for a few seconds, then CLOSE it.

7- OPEN only Vent Valve SC2-VCC-02 for a second, then CLOSE it.

8- Wait about 1 minute.

9- Repeat steps 7, 8, and 9, six (6) times.

10- OPEN only Vent Valve SC2-VCC-01, leave it open.

11- OPEN only Vent Valve SC2-VCC-02 for a second, then CLOSE it.

12- Wait about 1 minute.

13- Repeat steps 11, 12, and 13, six (6) times.

14- OPEN both Vent Valves SC2-VCC-01 and -02, leave open.

15- WAIT for chamber pressure to reach ~ 760 torr on SC2-GPI-01 and for chamber door to open.

16- Continue with operations.

                                                

SC3/DSD PUMP DOWN:

1- Wipe down SC3 Chamber door sealing surface and ensure no wires or cables are across the seal.

2- Close SC3 Chamber Door and secure all door latches.

3- Close Vent Valves SC3-VCC-01 and -02, and DSD-VCC-01 and -02,

4- OPEN Foreline Valves SC3-VIC-01, then -03, then -02, then DSD-VIC-01.

5- WAIT for chamber pressure to reach at least 5x10-1 torr on SC3-GPI-01 and DSD-GPI-01.

6- START Turbos SC3-PTM-01, -02, -03, and DSD-PTM-01.

7- WAIT for Turbos to reach full speed.

8- ENABLE Cold Cathode Gauge SC3-GCC-01 and DSD-GCC-01.

9- WAIT for vacuum pressure to reach at least 5x10-6 torr.

10- Continue with operations.

SC3/DSD VENT:

1- Loosen and unlatch the SC3 Chamber Door.

2- STOP Turbos SC3-PTM-01, -02, -03, and DSD-PTM-01.

3- CLOSE Foreline Valves SC3-VIC-01, then -03, then -02, then DSD-VIC-01.

4- DISABLE Cold Cathode Gauge SC3-GCC-01 and DSD-GCC-01.

5- WAIT at least 15 minutes for Turbos to slow down.

6- OPEN only Vent Valve SC3-VCC-01 for a few seconds, then CLOSE it.

7- OPEN only Vent Valve SC3-VCC-02 for a second, then CLOSE it.

8- Wait about 1 minute.

9- Repeat steps 7, 8, and 9, six (6) times.

10- OPEN only Vent Valve SC3-VCC-01, leave it open.

11- OPEN only Vent Valve SC3-VCC-02 for a second, then CLOSE it.

12- Wait about 1 minute.

13- Repeat steps 11, 12, and 13, six (6) times.

14- OPEN Vent Valves SC3-VCC-01 and -02, and DSD-VCC-01, and 02, leave open.

15- WAIT for chamber pressure to reach ~ 760 torr on SC3-GPI-01 and for chamber door to open.

16- Continue with operations.     

             


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