X-Y quality check for optical metrology measurements
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segm:        S1      S2     dS1     dS2        L1      L2     dL1     dL2    angle(deg)   D1      D2      dD   d(dS)   d(dL)
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segm: 0   20902   20906    -187    -183     43537   43539      85      87   -0.24346   48294   48299      -5      -4      -2
segm: 1   20904   20905    -136    -135     43541   43541      61      61   -0.17830   48295   48303      -7      -1       0
segm: 2   20905   20903     125     123     43539   43536     -60     -63   -0.16318   48294   48297      -3       2       3
segm: 3   20913   20903     126     116     43541   43536     -54     -59   -0.15923   48300   48297       2      10       5
segm: 4   20904   20902       3       1     43544   43544       0       0    0.00263   48302   48300       1       2       0
segm: 5   20908   20908    -291    -291     43542   43537     144     139   -0.38294   48302   48298       3       0       5
segm: 6   20906   20899     -24     -31     43538   43536      16      14    0.03619   48296   48293       3       7       2
segm: 7   20903   20900     111     108     43543   43536     -53     -60   -0.14410   48293   48300      -7       3       7
segm: 8   20910   20909     -89     -90     43543   43541      45      43   -0.11777   48303   48301       1       1       2
segm: 9   20908   20907     -19     -20     43550   43552       3       5   -0.02565   48304   48314      -9       1      -2
segm:10   20903   20907       0       4     43537   43536       2       1   -0.00263   48298   48293       4      -4       1
segm:11   20914   20912      76      74     43548   43545     -35     -38   -0.09868   48307   48308       0       2       3
segm:12   20905   20911    -144    -138     43551   43549      60      58   -0.18550   48301   48316     -15      -6       2
segm:13   20899   20894     -57     -62     43545   43544      35      34   -0.07829   48304   48293      10       5       1
segm:14   20876   20901      93     118     43540   43536     -61     -65   -0.13884   48278   48300     -22     -25       4
segm:15   20909   20903     -48     -54     43539   43538      27      26    0.06711   48299   48295       3       6       1
segm:16   20905   20903      87      85     43546   43545     -40     -41    0.11316   48303   48302       1       2       1
segm:17   20903   20906     -31     -28     43481   43486       6      11   -0.03887   48242   48252     -10      -3      -5
segm:18   20909   20910      90      91     43538   43541     -49     -46   -0.11909   48296   48303      -7      -1      -3
segm:19   20911   20924    -118    -105     43542   43547      46      51    0.14671   48303   48313      -9     -13      -5
segm:20   20907   20910      29      32     43550   43544      -9     -15    0.04013   48308   48304       4      -3       6
segm:21   20906   20909     -33     -30     43544   43545      13      14   -0.04145   48302   48305      -2      -3      -1
segm:22   20908   20908       2       2     43538   43541      -4      -1   -0.00263   48298   48300      -2       0      -3
segm:23   20912   20910    -110    -112     43542   43541      54      53    0.14606   48302   48302       0       2       1
segm:24   20912   20909     -36     -39     43545   43551      19      25   -0.04934   48311   48304       7       3      -6
segm:25   20905   20906    -108    -107     43545   43545      52      52   -0.14145   48303   48303       0      -1       0
segm:26   20890   20901    -215    -204     43531   43530      99      98    0.27575   48284   48288      -3     -11       1
segm:27   20910   20905    -253    -258     43539   43536     124     121    0.33624   48298   48298       0       5       3
segm:28   20905   20904      94      93     43540   43536     -43     -47    0.12305   48296   48296       0       1       4
segm:29   20897   20910       3      16     43542   43542      -1      -1    0.01250   48302   48296       6     -13       0
segm:30   20916   20908    -285    -293     43540   43537     143     140    0.38031   48303   48298       4       8       3
segm:31   20907   20911     -92     -88     43538   43538      46      46    0.11844   48301   48296       5      -4       0
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