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ATEF

Ken Lauer

LY45

Tong Ju 

LY45 (CVMI with complicated new configuration) was delivered successfully. Control did lots of work including adding new manipulator in the beam line, moving two piezo motors from LAMP to CVMI, redefining CVMI six motion axises, rearranging CVMI vacuum design. All works very well and TMO decides to keep the new manipulator into the beam line and adding two more piezo motors into CVMI gas jet later because the good experience of LY45.  

Lightpath

Robert S. Tang-Kong 

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