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| Desc | XPS Controller | Motor name | Channel | Position | Desc. position |
|---|---|---|---|---|---|
| USHM | XPS:LI20:MC03 | PB10 M2 Removal Stage | M1 | 0.5 mm / 41 mm | in/out (E320 position) |
| Axicon Vertical | XPS:LI20:MC04 | PB2 Lens Vertical | M2 | 47.9 4 mm | Axicon beam center overlaps with beam center |
| Axicon Horizontal | XPS:LI20:MC04 | PB3 Lens Horizontal | M3 | 4.899 mm | Axicon beam center overlaps with beam center |
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