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PDF |
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name | AE-1000-490X HEATER ASSY.pdf |
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Inventory
The table below is most likely out of date. For the 19-0 ring, please use this document as a reference (it collects all the info on the heaters wired and measured by Valentina and Sam in Jan 2020):
https://docs.google.com/spreadsheets/d/1s-4BwTW910EQzInhqSd7pgCI3uvk52Jl/edit#gid=2064913736
Sample | Label | Dimension | Quantity | Who | Date |
Heaters single size | A19 | 21.3x20.5 | 9 | Marco | 3/21/19 |
Heaters single size | B19 | 21.3x20.5 | 9 | Marco | 3/21/19 |
Heaters quad size | C19 | 45x41 | 25 | Marco | 3/21/19 |
Heaters dummies for tests (wafer edges) | D19 | 45x41 | 20 | Marco | 3/21/19 |
Stavelets | 12-16 | (2 quad heaters per stavelet) | 5 | Marco | 2/20/19 |
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