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Table 1.6

Value

Device Type

Controllable

PSC

Ethernet PS Controller

Y

EIOC

Embedded

IOC

Input/Output Controller

Y

MOC

Motor Controller

Y

MCOR

MCOR Controller

Y

PAC

Phase and Amplitude Controller

Y

PLC

Programmable Logic Controller

Y

PSC

Ethernet PS Controller

Y

VGC

Vacuum Gauge Controller

Y

VPC

Vacuum Pump Controller

Y

VVC

Vacuum Valve Controller

Y

VFC

Vacuum Flow Controller

Y

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