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From metrology file we may evaluate the tile center coordinates as an average over 4 corners. Tilt angles are defined as projected angles of the tile sides on relevant planes. Each angle is evaluated as an averaged angle for 2 sides. The tile location and orientation in the parent frame can be saved in the table record where

• Parent name - name and version of the parent object; all translation and rotation pars are defined w.r.t. parent Cartesian frame
• Parent index - index of the parent object
• Object name - name and version of the object inserted in the parent frame
• Object index - index of the object
• X0, Y0, and Z0 [μm] - object frame origin coordinates in the parent frame
• Rotation X, Y, and Z [degree] - object ideal (design) rotation angle around X, Y, and Z axis of the parent frame, respectively,
• Tilt X, Y, and Z [degree] - tilt angles for correction of the object rotation angles around X, Y, and Z axis of the parent frame, respectively.

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