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| Parent name | Parent index | Object name | Object index | XcX0[µm] | YcY0[µm]Yc | Y0[µm] | Rotation in X-Y Z [°] | Rotation in Y -Z [°] | Rotation in X-Z[°] | Tilt in X-YZ[°] | Tilt in Y-Z[°] | Tilt in X-Z[°] |
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where
- Parent name name - name and version of the parent object; all translation and rotation pars are defined w.r.t. parent Cartesian frame
- Parent index - index of the parent object
- Object name - name and version of the object inserted in parent frame
- Object index - index of the object
- XcX0, YcY0, and Zc Z0 [µm] – object frame origin coordinates in the parent frame
- Rotation angles X, Y, and Z [degree] – object ideal (design) rotation angle in X-Y, Y-Zaround axes Z, Y, and X -Z planes of the parent frame
- Tilt in X-Y, Y-Z, X-and Z [degree] – small tilt angles for correction of the object orientation w.r.t. design rotation anglerotation angles around axes Z, Y, and X of the parent frame, respectively
Tile center coordinates are defined as an average over 4 corners.
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