Page History
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| Code Block |
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pair: S1 S2 dS1 dS2 L1 L2 dL1 dL2 <dS/L> angle(deg) D1 D2 dD d(dS) d(dL) dz3(um) Quad 0 pair: 0 20910 20910 -180 -180 43550 43540 90 80 -0.00413 -0.23684 48304 48306 -2 0 10 99.997 pair: 1 20920 20920 -200 -200 43560 43630 10 80 -0.00459 -0.26285 48309 48401 -92 0 -70 100.033 pair: 2 20910 20100 10 820 43550 43540 10 0 0.00011 0.00658 47960 48305 -345 -810 10 1724.336 pair: 3 20910 20900 -140 -130 43540 43530 -60 -70 -0.00310 -0.17767 48294 48294 0 -10 10 9.995 pair: 4 20900 20910 -220 -210 43540 43550 90 100 -0.00494 -0.28289 48296 48311 -15 -10 -10 -69.579 pair: 5 20920 20900 40 20 43200 43550 -20 330 0.00069 0.03968 48304 47999 305 20 -350 34.059 pair: 6 20910 20910 -130 -130 43530 43540 -70 -60 -0.00299 -0.17109 48294 48298 -4 0 -10 0.002 pair: 7 20910 20909 -130 -129 43540 43540 -60 -60 -0.00297 -0.17041 48302 48298 4 -1 0 -30.000 |
- pair 1: Correction to point 2: x+0.07mm; 0.01 → 0.08
- pair 2 0.8mm deviation in X: Correction to point 16: x−0.8mm; 44.63 → 43.83
- pair 5: 0.35mm deviation in X: Correction to point 24: x+0.35mm; 90.62 → 90.97
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| Code Block |
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pair: S1 S2 dS1 dS2 L1 L2 dL1 dL2 <dS/L> angle(deg) D1 D2 dD d(dS) d(dL) dz3(um) Quad 0 pair: 0 20910 20910 -180 -180 43550 43540 90 80 -0.00413 -0.23684 48304 48306 -2 0 10 99.997 pair: 1 20920 20920 -200 -200 43560 4363043560 1080 80 -0.00459 -0.2628526307 48309 4840148338 -9229 0 -70 0 100.033000 pair: 2 20110 20100 10 20 43550 43540 10 0 0.00011 0.00658 47960 47964 -4 -10 10 39.998 pair: 3 20910 20900 -140 -130 43540 43530 -60 -70 -0.00310 -0.17767 48294 48294 0 -10 10 9.995 pair: 4 20900 20910 -220 -210 43540 43550 90 100 -0.00494 -0.28289 48296 48311 -15 -10 -10 -20.009 pair: 5 20920 20900 40 20 43550 43550 -20 -20 0.00069 0.03947 48304 48314 -10 20 0 10.000 pair: 6 20910 20910 -130 -130 43530 43540 -70 -60 -0.00299 -0.17109 48294 48298 -4 0 -10 0.002 pair: 7 20910 20909 -130 -129 43540 43540 -60 -60 -0.00297 -0.17041 48302 48298 4 -1 0 -30.000 |
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- X coordinates are corrected for points 2, 16 and , 24
- Z coordinate is corrected for points 13, 17, 18, 21, 22
- After that all deviations are ~10um.
References
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