Corrected points:
Quad 0
point   X       Y       Z
#4       95420  -4982  158686
4        95420  -3988  158686
 
Quad 1
point   X      Y      Z
#9       15847  43156  158511
9        15847  43054  158511

Quad 2
point   X      Y      Z
#12      58727 123727  158774
12       58727 123587  158774
 
X-Y quality check for optical metrology measurements 
----------------------------------------------------------------------------------------------------------------------------
segm:        S1      S2     dS1     dS2        L1      L2     dL1     dL2    angle(deg)   D1      D2      dD   d(dS)   d(dL)
----------------------------------------------------------------------------------------------------------------------------
segm: 0   36699   36691    -477    -485     39689   39689     436     436    0.69435   54051   54063     -11       8       0
segm: 1   36702   36696    -483    -489     39683   39678     439     434    0.70171   54044   54063     -19       6       5
segm: 2   36716   36681     -72    -107     39693   39650      70      27    0.12926   54018   54068     -49      35      43
segm: 3   36690   36705    -405    -390     39713   39684     390     361    0.57368   54070   54058      11     -15      29
segm: 4   36718   36692     388     362     39723   39746    -323    -300    0.54072   54121   54069      51      26     -23
segm: 5   36702   36703     332     333     39721   39701    -306    -326    0.47973   54069   54083     -13      -1      20
segm: 6   36701   36701     696     696     39702   39700    -631    -633    1.00435   54082   54065      16       0       2
segm: 7   36664   36664     369     369     39714   39708    -343    -349    0.53238   54046   54054      -7       0       6
segm: 8   36677   36713    -412    -376     39744   39682     420     358    0.56842   54092   54055      36     -36      62
segm: 9   36695   36728    -338    -305     39744   39719     319     294    0.46362   54104   54090      13     -33      25
segm:10   36702   36736    -263    -229     39708   39708     231     231    0.35496   54087   54082       4     -34       0
segm:11   36725   36688    -614    -651     39683   39703     596     616    0.91292   54086   54055      30      37     -20
segm:12   36706   36692     476     462     39668   39671    -429    -426    0.67736   54050   54040      10      14      -3
segm:13   36672   36714     523     565     39697   39708    -512    -501    0.78501   54064   54069      -5     -42     -11
segm:14   36705   36692     538     525     39731   39700    -479    -510    0.76673   54078   54082      -3      13      31
segm:15   36696   36695     473     472     39712   39699    -421    -434    0.68179   54076   54062      13       1      13
----------------------------------------------------------------------------------------------------------------------------
  WARNING segm  8:  |62| > 60.0
Z quality check for optical metrology measurements 
-----------------------------------------------------------------------------------------------------------------------------------------
segm:        SA      LA   XSize   YSize    dZS1  dZS2  dZL1  dZL2    dZSA  dZLA  ddZS  ddZL     dZX   dZY   angXZ(deg) angYZ(deg) dz3(um)
-----------------------------------------------------------------------------------------------------------------------------------------
segm: 0   36695   39689   36695   39689      44   248    54   258     146   156  -204  -204     146   156   0.22796    0.22520   -204.009
segm: 1   36699   39680   36699   39680      85   115   -30     0     100   -15   -30   -30     100   -15   0.15612   -0.02166    -30.010
segm: 2   36698   39671   36698   39671     146   274    23   151     210    87  -128  -128     210    87   0.32786    0.12565   -128.163
segm: 3   36697   39698   36697   39698     171   109     1   -61     140   -30    62    62     140   -30   0.21858   -0.04330     62.067
segm: 4   36705   39734   39734   36705       8    89    26   107      48    66   -81   -81      66    48   0.09589    0.07571     80.991
segm: 5   36702   39711   39711   36702     -71  -149   204   126    -110   165    78    78     165  -110   0.23806   -0.17172    -77.894
segm: 6   36701   39701   39701   36701       0    14    24    38       7    31   -14   -14      31     7   0.04474    0.01093     14.001
segm: 7   36664   39711   39711   36664     -14   -42   123    95     -28   109    28    28     109   -28   0.15727   -0.04376    -27.981
segm: 8   36695   39713   36695   39713     235   111     0  -124     173   -62   124   124     173   -62   0.27012   -0.08945    124.224
segm: 9   36711   39731   36711   39731      84   152   -20    48     118    14   -68   -68     118    14   0.18416    0.02019    -67.912
segm:10   36719   39708   36719   39708      76   220  -241   -97     148  -169  -144  -144     148  -169   0.23094   -0.24385   -143.925
segm:11   36706   39693   36706   39693      82   103    -2    19      92     8   -21   -21      92     8   0.14438    0.01227    -21.083
segm:12   36699   39669   39669   36699      36   199    79   242     117   160  -163  -163     160   117   0.23181    0.18344    163.008
segm:13   36693   39702   39702   36693      75    42    85    52      58    68    33    33      68    58   0.09885    0.09135    -33.110
segm:14   36698   39715   39715   36698     169   165   160   156     167   158     4     4     158   167   0.22794    0.26073     -3.817
segm:15   36695   39705   39705   36695      96    65   177   146      80   161    31    31     161    80   0.23305    0.12569    -30.939
-----------------------------------------------------------------------------------------------------------------------------------------
  WARNING segm  0:  |-204.0| > 100.0
  WARNING segm  2:  |-128.2| > 100.0
  WARNING segm  8:  |124.2| > 100.0
  WARNING segm 10:  |-143.9| > 100.0
  WARNING segm 12:  |163.0| > 100.0