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changes.mady.by.user Khaghani, Dimitri

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Note a conflicting procedure / documentation in the procedures folder: 9.8.3 Pumping/Venting Procedure . These are being reconciled.

Readiness checklist

  •  All chamber doors must be closed
  •  All chamber flanges must be in place (no obvious opening)
  •  TC1:VGC:11, TC1:VGC:12, TC1-VGC-01, TC1-VGC-02, TC1-VGC-03, TC1-VGC-04 must be closed
  •  MEZ-PMF-01 EBARA A70, MEZ-PMF-02 EBARA A70 must be off (if faulted, press RESET)
  •  TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed
  •  MEZ-GPI-02 must display ~ 6.5e+02 torr (if lower, open MEZ:VGC:18 until restored, then close)
  •  TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed and allowed to open
  •  The gas ballast control knob of the scroll pump should be set to level 0
  •  Turbo pump should be at "Full Speed" (if not follow Turbo pump startup procedurebelow)

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If something goes off track during this procedure, initiate the venting procedure and check for leaks (flanges, virtual leaks, waterlines, etc).

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