Note a conflicting procedure / documentation in the procedures folder: 9.8.3 Pumping/Venting Procedure . These are being reconciled.
Readiness
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checklist
- All chamber doors must be closed
- All chamber flanges must be in place (no obvious opening)
- TC1:VGC:11, TC1:VGC:12, TC1-VGC-01, TC1-VGC-02, TC1-VGC-03, TC1-VGC-04 must be closed
- MEZ-PMF-01 EBARA A70, MEZ-PMF-02 EBARA A70 must be off (if faulted, press RESET)
- TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed
- MEZ-GPI-02 must display ~ 6.5e+02 torr (if lower, open MEZ:VGC:18 until restored, then close)
- TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed and allowed to open
Turbo pump startup procedure
- Open mechome, go the tab "User Devices", open the panel "User Sentry PDU"
- Turn On "Roughing pump PTM 02 (turbo 2)"
- after a while, scroll to turbo gate-valve (SEW-VGC-15) will switch to allowed to open. - Press OPN on SEW-VGC-15
- turbo status goes to "OK to Run" - Press RUN next to the turbo pump logo
- turbo status will go through "Accelerating" then "Full Speed" mode
The turbo pump subsystem is now ready for operation.
- The gas ballast control knob of the scroll pump should be set to level 0
- Turbo pump should be at "Full Speed" (if not follow Turbo pump startup procedurebelow)
Pumpdown
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procedure
- Press OPN on TC1-VGC-04
- Press RUN on MEZ-PMF-01 EBARA A70
- Press OPN on MEZ:VGC:17 (wait a few seconds if MEZ:VGC:17 cannot open)
- Press RUN on MEZ-PMF-02 EBARA A70
- Press OPN on MEZ-VIC-19 (wait a few seconds if MEZ-VIC-19 cannot open)
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- Wait until MEC:TC1:GPI:01
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- drops below 5.0e-02 torr
- Press OPN on TC1-VGC-02
- Press CLS on MEZ:VGC:17
- Press STP on MEZ-PMF-01 EBARA A70
- Press CLS on MEZ-VIC-19
- Press STP on MEZ-PMF-02 EBARA A70
- Press OPN on MEZ:VGC:18
- Wait until MEZ-GPI-02 passes above ~ 6.5e+02 torr
- Press CLS on MEZ:VGC:18
(typically after 30-40 minutes from startup).If something goes off track during this procedure, initiate the venting procedure and check for leaks (flanges, virtual leaks, waterlines, etc).
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Prerequisites
Turbo pump
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startup
- Open mechome, go to the tab "User Devices", open the panel "User Sentry PDU"
- Turn On "Roughing pump PTM 02 (turbo 2)"
- Wait until SEW:GPI:04 drops below 1.0e-02 torr
- Press OPN on SEW-VGC-15
- Press RUN next to the turbo pump logo
- Wait until turbo pump displays "Full Speed"
Version tracking
Version | Release date | Description |
---|---|---|
v1.00 |
| Demonstration version |
v1.01 |
| Simplification of the procedure using only checklists |
Secondary vacuum pumping procedure
- Press OPN on TC1-VGC-02
- primary vacuum gate-valve will automatically close first, before turbo gate-valve opens → do not forget the primary vacuum shutdown procedure below
- target chamber Pirani gauge value should plummet, until it goes out of range and the target chamber cold-cathode gauge takes turn - Press STP on both Ebara pumps
- Press CLS on MEZ:VGC:17 and MEZ-VIC-19
- Press OPN on MEZ:VGC:18
- primary vacuum line will start venting
- wait until Pirani gauge MEZ-GPI-02 goes above ~ 6.5e+02 torr - Press CLS on MEZ:VGC:18
- primary vacuum venting valve should not stay open longer than ~ 5 minutes as it may heat up too much
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