Note a conflicting procedure / documentation in the procedures folder: 9.8.3 Pumping/Venting Procedure . These are being reconciled.

Readiness

Primary vacuum

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checklist

•  All chamber doors must be closed
•  All chamber flanges must be in place (no obvious opening)
•  TC1:VGC:11, TC1:VGC:12, TC1-VGC-01, TC1-VGC-02, TC1-VGC-03, TC1-VGC-04 must be closed
•  MEZ-PMF-01 EBARA A70, MEZ-PMF-02 EBARA A70 must be off (if faulted, press RESET)
•  TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed
•  MEZ-GPI-02 must display ~ 6.5e+02 torr (if lower, open MEZ:VGC:18 until restored, then close)
•  TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed and allowed to open

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•  The gas ballast control knob of the scroll pump should be set to level 0
•  Turbo pump should be at "Full Speed" (if not follow Turbo pump startup procedurebelow)

Pumpdown procedure

•  Press OPN on TC1-VGC-04
•  Press RUN on MEZ-PMF-01 EBARA A70
•  Press OPN on MEZ:VGC:17 (wait a few seconds if MEZ:VGC:17 cannot open)
•  Press RUN on MEZ-PMF-02 EBARA A70
•  Press OPN on MEZ-VIC-19 (wait a few seconds if MEZ-VIC-19 cannot open)

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•  Wait until MEC:TC1:GPI:01

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• drops below 5.0e-02 torr
•  Press OPN on TC1-VGC-02
•  Press CLS on MEZ:VGC:17
•  Press STP on MEZ-PMF-01 EBARA A70
•  Press CLS on MEZ-VIC-19
•  Press STP on MEZ-PMF-02 EBARA A70
•  Press OPN on MEZ:VGC:18
•  Wait until MEZ-GPI-02 passes above ~ 6.5e+02 torr
•  Press CLS on MEZ:VGC:18

(typically after 30-40 minutes from startup).If something goes off track during this procedure, initiate the venting procedure and check for leaks (flanges, virtual leaks, waterlines, etc).

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Turbo pump startup

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This procedure can be done anytime as long as the turbo gate-valve to the target chamber is closed. The following steps assume that the turbo pump branch is fully shutdown (scroll off, scroll to turbo gate-valve closed, turbo off, turbo to target chamber gate-valve-closed). If the system is in an intermediate state, you can restart the following procedure from the corresponding step. In this example, we consider only turbo pump #2 associated with gate-valve TC1-VGC-02.

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•  Open mechome, go to

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• the tab "User Devices"

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• , open the panel "User Sentry PDU"

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•  Turn On "Roughing pump PTM 02 (turbo 2)"

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•  Wait until SEW:GPI:04 drops below 1.0e-02 torr
•  Press OPN on SEW-VGC-15

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•  Press RUN next to the turbo pump logo

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•  Wait until turbo pump displays "Full Speed"

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The turbo pump subsystem is now ready for operation.

Prerequisites

• Turbo pump subsystem must be up and running as described above.
• Primary vacuum pumping procedure must have been completed.
• Target chamber Pirani gauge (MEC:TC1:GPI:01) must be below 5.0e-02 torr.
• On the striptool graph, the target chamber Pirani gauge curve should look asymptotic, meaning the primary vacuum subsystem has reached saturation.

Secondary vacuum pumping procedure

• Press OPN on TC1-VGC-02
  - primary vacuum gate-valve will automatically close first, before turbo gate-valve opens → do not forget the primary vacuum shutdown procedure below
  - target chamber Pirani gauge value should plummet, until it goes out of range and the target chamber cold-cathode gauge takes turn
• Press STP on both Ebara pumps
• Press CLS on MEZ:VGC:17 and MEZ-VIC-19
• Press OPN on MEZ:VGC:18
  - primary vacuum line will start venting
  - wait until Pirani gauge MEZ-GPI-02 goes above ~ 6.5e+02 torr
• Press CLS on MEZ:VGC:18
  - primary vacuum venting valve should not stay open longer than ~ 5 minutes as it may heat up too much

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