Note a conflicting procedure / documentation in the procedures folder: 9.8.3 Pumping/Venting Procedure . These are being reconciled.
Readiness checklist
- All chamber doors must be closed
- All chamber flanges must be in place (no obvious opening)
- TC1:VGC:11, TC1:VGC:12, TC1-VGC-01, TC1-VGC-02, TC1-VGC-03, TC1-VGC-04 must be closed
- MEZ-PMF-01 EBARA A70, MEZ-PMF-02 EBARA A70 must be off (if faulted, press RESET)
- TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed
- MEZ-GPI-02 must display ~ 6.5e+02 torr (if lower, open MEZ:VGC:18 until restored, then close)
- TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed and allowed to open
- The gas ballast control knob of the scroll pump should be set to level 0
- Turbo pump should be at "Full Speed" (if not follow Turbo pump startup procedurebelow)
Pumpdown procedure
- Press OPN on TC1-VGC-04
- Press RUN on MEZ-PMF-01 EBARA A70
- Press OPN on MEZ:VGC:17 (wait a few seconds if MEZ:VGC:17 cannot open)
- Press RUN on MEZ-PMF-02 EBARA A70
- Press OPN on MEZ-VIC-19 (wait a few seconds if MEZ-VIC-19 cannot open)
- Wait until MEC:TC1:GPI:01 drops below 5.0e-02 torr
- Press OPN on TC1-VGC-02
- Press CLS on MEZ:VGC:17
- Press STP on MEZ-PMF-01 EBARA A70
- Press CLS on MEZ-VIC-19
- Press STP on MEZ-PMF-02 EBARA A70
- Press OPN on MEZ:VGC:18
- Wait until MEZ-GPI-02 passes above ~ 6.5e+02 torr
- Press CLS on MEZ:VGC:18
If something goes off track during this procedure, initiate the venting procedure and check for leaks (flanges, virtual leaks, waterlines, etc).
Turbo pump startup
- Open mechome, go to the tab "User Devices", open the panel "User Sentry PDU"
- Turn On "Roughing pump PTM 02 (turbo 2)"
- Wait until SEW:GPI:04 drops below 1.0e-02 torr
- Press OPN on SEW-VGC-15
- Press RUN next to the turbo pump logo
- Wait until turbo pump displays "Full Speed"
Version tracking
Version | Release date | Description |
---|---|---|
v1.00 |
| Demonstration version |
v1.01 |
| Simplification of the procedure using only checklists |
Tools necessary for operation
It is necessary to open a couple of windows to be ready to operate the vacuum system. You must be operating from one of the hutch computer (mec-daq, mec-monitor, mec-console, mec-laser, mec-hutch01, mec-laptop08), or you can ssh to these computers.
mechome
In a terminal, type mechome to open the above window. It is the start point of many processes in the MEC system.
MEC Vacuum
In mechome, in the top left part of the window, press the "Vacuum" button to unfold the menu, then select MEC Vacuum to open the above window. It will be used to operate the pumping system components: pumps, gate-valves, etc
tc_vacuum
In a terminal logged as mecopr, type tc_vacuum to open the above window. Often called "striptool", this type of window can display the time evolution of some environmental parameters. Here it shows 4 curves monitoring the pressure value read by 4 different gauges. You can reshape the window and change the time axis range to monitor pressure values over a long time span (~ 1 hour). The curves correspond to the following gauges:
MEC:TC1:GPI:01:PMON → target chamber Pirani gauge
MEC:TC1:GCC:01:PMON → target chamber Cold-cathode gauge
MEC:SEW:GPI:03:PMON → scroll pump Pirani gauge (Maglev roughing)
MEC:SEW:GPI:04:PMON → scroll pump Pirani gauge (Varian turbo roughing)
List of PVs associated to the vacuum system components
Pumps
...
Gate-valves
...
Logical permissions on the gate-valves
...
Pressure gauges
PV | Function | |
---|---|---|
MEC:TC1:GMP:01:PRESS | Target chamber capacitance gauge (out of order) | |
MEC:TC1:GPI:01:PMON | Target chamber Pirani gauge | |
MEC:TC1:GCC:01:PMON | Target chamber cold-cathode gauge | |
MEC:MEZ:GPI:02:PMON | Primary vacuum line Pirani gauge | |
MEC:MEZ:GPI:06:PMON | Ebara pump 1 inlet Pirani gauge | |
MEC:MEZ:GPI:07:PMON | Ebara pump 2 inlet Pirani gauge | |
MEC:SEW:GPI:04:PMON | Scroll (turbo 2) pump inlet Pirani gauge||