Note a conflicting procedure / documentation in the procedures folder: 9.8.3 Pumping/Venting

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Prerequisites

• If ending operation with the x-ray beamline, make sure that the pulse picker is closed, stopper S6 is inserted, hutch search is broken and glass window inserted.
• Stand next to the chamber during the procedure to be ready to react once the chamber is vented and avoid over-pressurization.

Venting procedure

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Procedure . These are being reconciled.

Readiness checklist

•  All chamber doors must be closed
•  All chamber flanges must be in place (no obvious opening)
•  TC1:VGC:11, TC1:VGC:12, TC1-VGC-01, TC1-VGC-02, TC1-VGC-03, TC1-VGC-04

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• must be closed
•  MEZ-PMF-01 EBARA A70, MEZ-PMF-02 EBARA A70 must be off (if faulted, press RESET)
•  TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed
•  MEZ-GPI-02 must display ~ 6.5e+02 torr (if lower, open MEZ:VGC:18 until restored, then close)
•  TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed and allowed to open
•  The gas ballast control knob of the scroll pump should be set to level 0
•  Turbo pump should be at "Full Speed" (if not follow Turbo pump startup procedurebelow)

Pumpdown procedure

•  Press OPN on TC1-VGC-04
•  Press RUN on MEZ-PMF-01 EBARA A70
•  Press OPN on MEZ:VGC:17 (wait a few seconds if MEZ:VGC:17 cannot open)
•  Press RUN on MEZ-PMF-02 EBARA A70
•  Press OPN on MEZ-VIC-19 (wait a few seconds if MEZ-VIC-19 cannot open)
•  Wait until MEC:TC1:GPI:01 drops below 5.0e-02 torr
•  Press OPN on TC1-VGC-02
•  Press CLS on MEZ:VGC:17
•  Press STP on MEZ-PMF-01 EBARA A70
•  Press CLS on MEZ-VIC-19
•  Press STP on MEZ-PMF-02 EBARA A70
•  Press OPN on MEZ:VGC:18
•  Wait until MEZ-GPI-02 passes above ~ 6.5e+02 torr
•  Press CLS on MEZ:VGC:18

If something goes off track during this procedure, initiate the venting procedure and check for leaks (flanges, virtual leaks, waterlines, etc).

Turbo pump startup

•  Open mechome, go to the tab "User Devices", open the panel "User Sentry PDU"
•  Turn On "Roughing pump PTM 02 (turbo 2)"
•  Wait until SEW:GPI:04 drops below 1.0e-02 torr
•  Press OPN on SEW-VGC-15
•  Press RUN next to the turbo pump logo
•  Wait until turbo pump displays "Full Speed"

Version tracking

Turbo pump shutdown

It is not mandatory to shutdown the turbo pump during each venting cycle. We usually let it run when venting for a short time during a shift. If venting for a longer time between two shifts, we usually turn off the turbo pump but not its rouging. The following steps describe a full shutdown of the turbo line after venting.

• Press STP next to the turbo pump logo
  - let the turbo spin down for at least 15-20 minutes (the off-status logo on the turbo does not mean the blades have stopped spinning)
  - stop at this step if you will restart the turbo in less than a day, additionally you can set the scroll ballast to level I (it can be set to level 0 or I during operation)
• Press CLS on SEW-VGC-15
  - make sure ballast level is set to 0 before going to the next step
• Open mechome
• Go the tab "User Devices"
• Open the panel "User Sentry PDU"
• Turn Off "Roughing pump PTM 02 (turbo 2)"

List of PVs associated to the vacuum system components

Pumps

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Gate-valves

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Logical permissions on the gate-valves 

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Pressure gauges