Page History
...
- It is clear that blind application of geoptimizer may cause >1 mm offset of panels in x-y ...
- It is suggested to use geoptimizer for panels with fixed center and panel orientation in (x,y) from optical metrology and apply optimization for z coordinate and off-plane tilts. Z coordinates were not measured correctly in optical metrology.
- Next optical metrology is expected to be with precise (~10um) Z measurement.
References
- EPIX10KA2M References
- Optical metrology of epix10ka2m.0 from 2018-11-18
- Optical metrology of epix10ka2m.0 from 2020-06-25
- EPIX10KA2M and EPIX10KAQUAD
- EPIX10KA panel flatness measurement
...
Overview
Content Tools