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Metrology data
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Kenney, Christopher J. <kenney@slac.stanford.edu>
Fri 11/13/2020 3:08 PM
Hi Mikhail,
Metrology for the MEC Quad-2 is attached.
Will drop off detector in ASC in a bit. |
Quality check
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X-Y quality check for optical metrology measurements
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segm: S1 S2 dS1 dS2 L1 L2 dL1 dL2 angle(deg) D1 D2 dD d(dS) d(dL)
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segm: 0 38007 38010 -310 -307 41049 40983 323 257 -0.43094 55924 55918 6 -3 66
segm: 1 37996 38014 51 69 41001 41004 -63 -60 0.08384 55903 55911 -8 -18 -3
segm: 2 38012 38022 83 93 41027 41046 -74 -55 0.12287 55954 55928 26 -10 -19
segm: 3 38032 38010 -91 -113 41029 41043 54 68 -0.14242 55918 55967 -49 22 -14
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WARNING segm 0: |66| > 60.0
Z quality check for optical metrology measurements
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segm: SA LA XSize YSize dZS1 dZS2 dZL1 dZL2 dZSA dZLA ddZS ddZL dZX dZY angXZ(deg) angYZ(deg) dz3(um)
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segm: 0 38008 41016 41016 38008 94 63 265 234 78 249 31 31 249 78 0.34853 0.11833 -30.579
segm: 1 38005 41002 41002 38005 82 -113 306 111 -15 208 195 195 208 -15 0.29135 -0.02337 -195.056
segm: 2 38017 41036 41036 38017 66 112 330 376 89 353 -46 -46 353 89 0.49285 0.13413 45.828
segm: 3 38021 41036 41036 38021 -7 -17 256 246 -12 251 10 10 251 -12 0.35045 -0.01808 -10.091
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WARNING segm 1: |-195.1| > 100.0 |
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