Metrology data

2020-11-13 Chris Kenney - new metrology 
Kenney, Christopher J. <kenney@slac.stanford.edu>
Fri 11/13/2020 3:08 PM

Hi Mikhail,
Metrology for the MEC Quad-2 is attached. 
Will drop off detector in ASC in a bit.

Quality check

X-Y quality check for optical metrology measurements 
----------------------------------------------------------------------------------------------------------------------------
segm:        S1      S2     dS1     dS2        L1      L2     dL1     dL2    angle(deg)   D1      D2      dD   d(dS)   d(dL)
----------------------------------------------------------------------------------------------------------------------------
segm: 0   38007   38010    -310    -307     41049   40983     323     257   -0.43094   55924   55918       6      -3      66
segm: 1   37996   38014      51      69     41001   41004     -63     -60    0.08384   55903   55911      -8     -18      -3
segm: 2   38012   38022      83      93     41027   41046     -74     -55    0.12287   55954   55928      26     -10     -19
segm: 3   38032   38010     -91    -113     41029   41043      54      68   -0.14242   55918   55967     -49      22     -14
----------------------------------------------------------------------------------------------------------------------------

  WARNING segm  0:  |66| > 60.0

Z quality check for optical metrology measurements 
-----------------------------------------------------------------------------------------------------------------------------------------
segm:        SA      LA   XSize   YSize    dZS1  dZS2  dZL1  dZL2    dZSA  dZLA  ddZS  ddZL     dZX   dZY   angXZ(deg) angYZ(deg) dz3(um)
-----------------------------------------------------------------------------------------------------------------------------------------
segm: 0   38008   41016   41016   38008      94    63   265   234      78   249    31    31     249    78   0.34853    0.11833    -30.579
segm: 1   38005   41002   41002   38005      82  -113   306   111     -15   208   195   195     208   -15   0.29135   -0.02337   -195.056
segm: 2   38017   41036   41036   38017      66   112   330   376      89   353   -46   -46     353    89   0.49285    0.13413     45.828
segm: 3   38021   41036   41036   38021      -7   -17   256   246     -12   251    10    10     251   -12   0.35045   -0.01808    -10.091
-----------------------------------------------------------------------------------------------------------------------------------------

  WARNING segm  1:  |-195.1| > 100.0

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