Page History
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Orientation of the detector in optical metrology was unusual. By standard convention Q0 should be in the be in the bottom-left corner. In measurements it was in the bottom-right corner. |
Quality Check
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X-Y quality check for optical metrology measurements ---------------------------------------------------------------------------------------------------------------------------- segm: S1 S2 dS1 dS2 L1 L2 dL1 dL2 angle(deg) D1 D2 dD d(dS) d(dL) ---------------------------------------------------------------------------------------------------------------------------- segm: 0 36681 36716 149 184 39707 39695 -133 -145 -0.24029 54075 54054 21 -35 12 segm: 1 36702 36697 285 280 39690 39690 -263 -263 -0.40781 54056 54061 -4 5 0 segm: 2 36712 36691 313 292 39125 39699 -287 287 -0.43976 54061 53650 410 21 -574 segm: 3 36703 36677 208 182 39698 39695 -175 -178 -0.28145 54058 54054 4 26 3 segm: 4 36726 36696 -141 -171 39706 39699 129 122 -0.22513 54060 54088 -27 30 7 segm: 5 36677 36682 -95 -90 39711 39684 97 70 -0.13351 54048 54051 -2 -5 27 segm: 6 36696 36686 42 32 39696 39686 -56 -66 0.05341 54032 54072 -39 10 10 segm: 7 36870 36699 87 -84 39688 39703 -95 -80 0.00217 54055 54183 -127 171 -15 segm: 8 36699 36699 87 87 39719 39719 -66 -66 -0.12550 54089 54068 20 0 0 segm: 9 36728 36705 178 155 39697 39712 -168 -153 -0.24027 54076 54086 -9 23 -15 segm:10 36703 36700 139 136 39713 39691 -117 -139 -0.19843 54067 54069 -2 3 22 segm:11 36721 36705 -16 -32 39688 39691 21 24 0.03465 54066 54067 0 16 -3 segm:12 36692 36700 31 39 39703 39693 -50 -60 0.05052 54044 54078 -34 -8 10 segm:13 36714 36706 -29 -37 39697 39700 37 40 -0.04763 54076 54064 11 8 -3 segm:14 36707 36689 -545 -563 39704 39723 509 528 -0.79922 54083 54075 7 18 -19 segm:15 36693 36698 -70 -65 39721 39693 90 62 -0.09740 54076 54057 18 -5 28 ---------------------------------------------------------------------------------------------------------------------------- WARNING segm 2: |410| > 60.0 WARNING segm 2: |-574| > 60.0 WARNING segm 7: |-127| > 60.0 WARNING segm 7: |171| > 60.0 Z quality check for optical metrology measurements ----------------------------------------------------------------------------------------------------------------------------------------- segm: SA LA XSize YSize dZS1 dZS2 dZL1 dZL2 dZSA dZLA ddZS ddZL dZX dZY angXZ(deg) angYZ(deg) dz3(um) ----------------------------------------------------------------------------------------------------------------------------------------- segm: 0 36698 39701 36698 39701 -135 -21 144 258 -78 201 -114 -114 -78 201 -0.12178 0.29008 -114.171 segm: 1 36699 39690 36699 39690 -78 -325 368 121 -201 244 247 247 -201 244 -0.31458 0.35295 246.999 segm: 2 36701 39412 36701 39412 -224 -239 206 191 -231 198 15 15 -231 198 -0.36140 0.28857 18.177 segm: 3 36690 39696 36690 39696 -57 -123 302 236 -90 269 66 66 -90 269 -0.14055 0.38825 66.015 segm: 4 36711 39702 39702 36711 166 208 -42 0 187 -21 -42 -42 -21 187 -0.03031 0.29185 42.128 segm: 5 36679 39697 39697 36679 347 270 77 0 308 38 77 77 38 308 0.05557 0.48189 -76.991 segm: 6 36691 39691 39691 36691 0 321 -240 81 160 -79 -321 -321 -79 160 -0.11476 0.25063 320.934 segm: 7 36784 39695 39695 36784 149 410 -234 27 279 -103 -261 -261 -103 279 -0.14939 0.43534 261.770 segm: 8 36699 39719 36699 39719 -21 -46 345 320 -33 332 25 25 -33 332 -0.05230 0.47963 24.999 segm: 9 36716 39704 36716 39704 24 -12 458 422 6 440 36 36 6 440 0.00936 0.63492 36.154 segm:10 36701 39702 36701 39702 -213 -33 224 404 -123 314 -180 -180 -123 314 -0.19202 0.45314 -180.101 segm:11 36713 39689 36713 39689 -191 0 234 425 -95 329 -191 -191 -95 329 -0.14904 0.47566 -190.893 segm:12 36696 39698 39698 36696 299 243 -78 -134 271 -106 56 56 -106 271 -0.15299 0.42312 -56.083 segm:13 36710 39698 39698 36710 216 266 -22 28 241 3 -50 -50 3 241 0.00433 0.37614 50.048 segm:14 36698 39713 39713 36698 251 211 -228 -268 231 -248 40 40 -248 231 -0.35779 0.36065 -39.767 segm:15 36695 39707 39707 36695 191 166 -143 -168 178 -155 25 25 -155 178 -0.22438 0.27870 -25.126 ----------------------------------------------------------------------------------------------------------------------------------------- WARNING segm 0: |-114.2| > 100.0 WARNING segm 1: |247.0| > 100.0 WARNING segm 6: |320.9| > 100.0 WARNING segm 7: |261.8| > 100.0 WARNING segm 10: |-180.1| > 100.0 WARNING segm 11: |-190.9| > 100.0 |
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