Metrology Data
Quality Check
X-Y quality check for optical metrology measurements
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segm: S1 S2 dS1 dS2 L1 L2 dL1 dL2 angle(deg) D1 D2 dD d(dS) d(dL)
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segm: 0 36681 36716 149 184 39707 39695 -133 -145 -0.24029 54075 54054 21 -35 12
segm: 1 36702 36697 285 280 39690 39690 -263 -263 -0.40781 54056 54061 -4 5 0
segm: 2 36712 36691 313 292 39125 39699 -287 287 -0.43976 54061 53650 410 21 -574
segm: 3 36703 36677 208 182 39698 39695 -175 -178 -0.28145 54058 54054 4 26 3
segm: 4 36726 36696 -141 -171 39706 39699 129 122 -0.22513 54060 54088 -27 30 7
segm: 5 36677 36682 -95 -90 39711 39684 97 70 -0.13351 54048 54051 -2 -5 27
segm: 6 36696 36686 42 32 39696 39686 -56 -66 0.05341 54032 54072 -39 10 10
segm: 7 36870 36699 87 -84 39688 39703 -95 -80 0.00217 54055 54183 -127 171 -15
segm: 8 36699 36699 87 87 39719 39719 -66 -66 -0.12550 54089 54068 20 0 0
segm: 9 36728 36705 178 155 39697 39712 -168 -153 -0.24027 54076 54086 -9 23 -15
segm:10 36703 36700 139 136 39713 39691 -117 -139 -0.19843 54067 54069 -2 3 22
segm:11 36721 36705 -16 -32 39688 39691 21 24 0.03465 54066 54067 0 16 -3
segm:12 36692 36700 31 39 39703 39693 -50 -60 0.05052 54044 54078 -34 -8 10
segm:13 36714 36706 -29 -37 39697 39700 37 40 -0.04763 54076 54064 11 8 -3
segm:14 36707 36689 -545 -563 39704 39723 509 528 -0.79922 54083 54075 7 18 -19
segm:15 36693 36698 -70 -65 39721 39693 90 62 -0.09740 54076 54057 18 -5 28
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WARNING segm 2: |410| > 60.0
WARNING segm 2: |-574| > 60.0
WARNING segm 7: |-127| > 60.0
WARNING segm 7: |171| > 60.0
Z quality check for optical metrology measurements
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segm: SA LA XSize YSize dZS1 dZS2 dZL1 dZL2 dZSA dZLA ddZS ddZL dZX dZY angXZ(deg) angYZ(deg) dz3(um)
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segm: 0 36698 39701 36698 39701 -135 -21 144 258 -78 201 -114 -114 -78 201 -0.12178 0.29008 -114.171
segm: 1 36699 39690 36699 39690 -78 -325 368 121 -201 244 247 247 -201 244 -0.31458 0.35295 246.999
segm: 2 36701 39412 36701 39412 -224 -239 206 191 -231 198 15 15 -231 198 -0.36140 0.28857 18.177
segm: 3 36690 39696 36690 39696 -57 -123 302 236 -90 269 66 66 -90 269 -0.14055 0.38825 66.015
segm: 4 36711 39702 39702 36711 166 208 -42 0 187 -21 -42 -42 -21 187 -0.03031 0.29185 42.128
segm: 5 36679 39697 39697 36679 347 270 77 0 308 38 77 77 38 308 0.05557 0.48189 -76.991
segm: 6 36691 39691 39691 36691 0 321 -240 81 160 -79 -321 -321 -79 160 -0.11476 0.25063 320.934
segm: 7 36784 39695 39695 36784 149 410 -234 27 279 -103 -261 -261 -103 279 -0.14939 0.43534 261.770
segm: 8 36699 39719 36699 39719 -21 -46 345 320 -33 332 25 25 -33 332 -0.05230 0.47963 24.999
segm: 9 36716 39704 36716 39704 24 -12 458 422 6 440 36 36 6 440 0.00936 0.63492 36.154
segm:10 36701 39702 36701 39702 -213 -33 224 404 -123 314 -180 -180 -123 314 -0.19202 0.45314 -180.101
segm:11 36713 39689 36713 39689 -191 0 234 425 -95 329 -191 -191 -95 329 -0.14904 0.47566 -190.893
segm:12 36696 39698 39698 36696 299 243 -78 -134 271 -106 56 56 -106 271 -0.15299 0.42312 -56.083
segm:13 36710 39698 39698 36710 216 266 -22 28 241 3 -50 -50 3 241 0.00433 0.37614 50.048
segm:14 36698 39713 39713 36698 251 211 -228 -268 231 -248 40 40 -248 231 -0.35779 0.36065 -39.767
segm:15 36695 39707 39707 36695 191 166 -143 -168 178 -155 25 25 -155 178 -0.22438 0.27870 -25.126
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WARNING segm 0: |-114.2| > 100.0
WARNING segm 1: |247.0| > 100.0
WARNING segm 6: |320.9| > 100.0
WARNING segm 7: |261.8| > 100.0
WARNING segm 10: |-180.1| > 100.0
WARNING segm 11: |-190.9| > 100.0
Quad 0
#11 689960 877893 325683
11 689960 877319 325683
Quad 1
#14 568969 840956 326006
14 568969 840785 326006
X-Y quality check for optical metrology measurements
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segm: S1 S2 dS1 dS2 L1 L2 dL1 dL2 angle(deg) D1 D2 dD d(dS) d(dL)
----------------------------------------------------------------------------------------------------------------------------
segm: 0 36681 36716 149 184 39707 39695 -133 -145 -0.24029 54075 54054 21 -35 12
segm: 1 36702 36697 285 280 39690 39690 -263 -263 -0.40781 54056 54061 -4 5 0
segm: 2 36712 36691 313 292 39125 39125 -287 -287 -0.44298 53644 53650 -6 21 0
segm: 3 36703 36677 208 182 39698 39695 -175 -178 -0.28145 54058 54054 4 26 3
segm: 4 36726 36696 -141 -171 39706 39699 129 122 -0.22513 54060 54088 -27 30 7
segm: 5 36677 36682 -95 -90 39711 39684 97 70 -0.13351 54048 54051 -2 -5 27
segm: 6 36696 36686 42 32 39696 39686 -56 -66 0.05341 54032 54072 -39 10 10
segm: 7 36699 36699 87 87 39688 39703 -95 -80 0.12557 54055 54067 -11 0 -15
segm: 8 36699 36699 87 87 39719 39719 -66 -66 -0.12550 54089 54068 20 0 0
segm: 9 36728 36705 178 155 39697 39712 -168 -153 -0.24027 54076 54086 -9 23 -15
segm:10 36703 36700 139 136 39713 39691 -117 -139 -0.19843 54067 54069 -2 3 22
segm:11 36721 36705 -16 -32 39688 39691 21 24 0.03465 54066 54067 0 16 -3
segm:12 36692 36700 31 39 39703 39693 -50 -60 0.05052 54044 54078 -34 -8 10
segm:13 36714 36706 -29 -37 39697 39700 37 40 -0.04763 54076 54064 11 8 -3
segm:14 36707 36689 -545 -563 39704 39723 509 528 -0.79922 54083 54075 7 18 -19
segm:15 36693 36698 -70 -65 39721 39693 90 62 -0.09740 54076 54057 18 -5 28
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Z quality check for optical metrology measurements
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segm: SA LA XSize YSize dZS1 dZS2 dZL1 dZL2 dZSA dZLA ddZS ddZL dZX dZY angXZ(deg) angYZ(deg) dz3(um)
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segm: 0 36698 39701 36698 39701 -135 -21 144 258 -78 201 -114 -114 -78 201 -0.12178 0.29008 -114.171
segm: 1 36699 39690 36699 39690 -78 -325 368 121 -201 244 247 247 -201 244 -0.31458 0.35295 246.999
segm: 2 36701 39125 36701 39125 -224 -239 206 191 -231 198 15 15 -231 198 -0.36140 0.29069 15.127
segm: 3 36690 39696 36690 39696 -57 -123 302 236 -90 269 66 66 -90 269 -0.14055 0.38825 66.015
segm: 4 36711 39702 39702 36711 166 208 -42 0 187 -21 -42 -42 -21 187 -0.03031 0.29185 42.128
segm: 5 36679 39697 39697 36679 347 270 77 0 308 38 77 77 38 308 0.05557 0.48189 -76.991
segm: 6 36691 39691 39691 36691 0 321 -240 81 160 -79 -321 -321 -79 160 -0.11476 0.25063 320.934
segm: 7 36699 39695 39695 36699 149 410 -234 27 279 -103 -261 -261 -103 279 -0.14939 0.43636 261.082
segm: 8 36699 39719 36699 39719 -21 -46 345 320 -33 332 25 25 -33 332 -0.05230 0.47963 24.999
segm: 9 36716 39704 36716 39704 24 -12 458 422 6 440 36 36 6 440 0.00936 0.63492 36.154
segm:10 36701 39702 36701 39702 -213 -33 224 404 -123 314 -180 -180 -123 314 -0.19202 0.45314 -180.101
segm:11 36713 39689 36713 39689 -191 0 234 425 -95 329 -191 -191 -95 329 -0.14904 0.47566 -190.893
segm:12 36696 39698 39698 36696 299 243 -78 -134 271 -106 56 56 -106 271 -0.15299 0.42312 -56.083
segm:13 36710 39698 39698 36710 216 266 -22 28 241 3 -50 -50 3 241 0.00433 0.37614 50.048
segm:14 36698 39713 39713 36698 251 211 -228 -268 231 -248 40 40 -248 231 -0.35779 0.36065 -39.767
segm:15 36695 39707 39707 36695 191 166 -143 -168 178 -155 25 25 -155 178 -0.22438 0.27870 -25.126
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WARNING segm 0: |-114.2| > 100.0
WARNING segm 1: |247.0| > 100.0
WARNING segm 6: |320.9| > 100.0
WARNING segm 7: |261.1| > 100.0
WARNING segm 10: |-180.1| > 100.0
WARNING segm 11: |-190.9| > 100.0
2022-03-08-epix10ka2m-APS-1-metrology-corr.txt
Geometry
converted in psana environment by the command
geometry_convert -f 2022-03-08-epix10ka2m-APS-1-geometry-r2.txt -o 2022-03-08-epix10ka2m-APS-1-geometry-r2.geom
Validation on Data
Data from this detector are not yet available as a numpy array shaped as (16, 352, 384)...
Alien data shows that orientation of panels is ok... and precision of panel assembling is so good that even alien data look very good....
References
- EPIX10KA2M References
- Repository for alignment files: /reg/g/psdm/detector/alignment/epix10ka2m/calib-xxx-epix10ka2m-APS-1-2022-03-08/*