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| Desc | XPS Controller | Motor name | Channel | Position | Desc. position |
|---|---|---|---|---|---|
| Axilens z | XPS:LI20:MC04 | PB1 Lens Z Position Stage | M1 | 20 | Position for Axilens |
| Axilens Vertical | XPS:LI20:MC04 | PB2 Lens Vertical | M2 | 0/100 in/out | Axicon beam center overlaps with beam center |
| Axilens Horizontal | XPS:LI20:MC04 | PB3 Lens Horizontal | M3 |
6.299 mm | Axicon beam center overlaps with beam center |
| USHM | XPS:LI20:MC03 | PB10 M2 Removal Stage | M1 |
3.5 mm / 44 mm | in/out (E320 position) |
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