Table of Contents
Intro:
this doc will walk you through starting up the RGA, gathering data, and sending it off for qualification.
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(For information on how to use the vacuum components of the carts, see Vacuum Cart Operation page)
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Gathering RGA data
first thing's first, double check:
- valves between RGA and turbo are open
- pressure is below 7e-6 torr
software settings:
connection issues? see Computer Recognition of RGA
open MKS Process Eye Professional
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