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Table of Contents

Intro:

this doc will walk you through starting up the RGA, gathering data, and sending it off for qualification.

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(For information on how to use the vacuum components of the carts, see Vacuum Cart Operation page)

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Gathering RGA data

first thing's first, double check:

      • valves between RGA and turbo are open
      • pressure is below 7e-6 torr

software settings:

connection issues? see Computer Recognition of RGA

open MKS Process Eye Professional 

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