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DescXPS ControllerMotor nameChannelPositionDesc. positionLast update
USHMXPS:LI20:MC03PB10 M2 Removal StageM140.5 mm away from the electron beam / axicon position (cross-check with 305 value above)E-320 position: mirror on the right side of the e-beam, steering laser onto 1st OAPJune 20, 2022

Alignment Target Vertical

UP/DOWN

XPS:LI20:MC10PB11 SFQED Target VerticalM10/99

Home position, needed when inserting or retracting OAP assembly. Do not drive to home (0) when MO tower is in IN position.

/Clear position with and without OAP assembly. Moving assembly requires moving out of clear position.


MO Tower Mover IN/OUTXPS:LI20:MC10PB12 SFQED Tower MoverM2-94.83 -93/0

IN position to look at focal spot.


Clear (retracted), also home position, needs to be done before retracting SFQED assembly


OAP Assembly IN/OUTXPS:LI20:MC10PB16 SFQED Assembly RemovalM3114/0

IN position to focus main beam.

Clear (retracted), also home positions, needs MO Tower to move out first, also needs Alignment target to move upwards first


Elliptical mirror/M3 IN/OUTXPS:LI20:MC10PB17 Elliptical mirror moverM4Positive limit switch/negative limit switch + 12 5

Out position. Configuration is 'SetCurrentPositionAsHome',so need to drive all the way to positive limit switch to ensure driven out.

In position. Drive all the way to negative end for IN position.


PB18 Focus Imaging VerticalXPS:LI20:MC10PB18 Focus Imaging VerticalM50Home at current position (0). Motor should not be touched or moved, should be clear in any case.

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