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Desc | XPS Controller | Motor name | Channel | Position | Desc. position |
---|---|---|---|---|---|
USHM | XPS:LI20:MC03 | PB10 M2 Removal Stage | M1 | 0.5 mm / 41 mm | in/out (E320 position) |
Axicon Vertical | XPS:LI20:MC04 | PB2 Lens Vertical | M2 | 47.4 mm | Axicon beam center overlaps with beam center |
Axicon Horizontal | XPS:LI20:MC04 | PB3 Lens Horizontal | M3 | 4.899 mm | Axicon beam center overlaps with beam center |
Axicon z | XPS:LI20:MC04 | PB1 Lens Z Position Stage | M1 | 0 | Position for Axicon |
E305
Desc | XPS Controller | Motor name | Channel | Position | Desc. position |
---|---|---|---|---|---|
Axilens z | XPS:LI20:MC04 | PB1 Lens Z Position Stage | M1 | 20 | Position for Axilens |
Axilens Vertical | XPS:LI20:MC04 | PB2 Lens Vertical | M2 | 0 | Axicon beam center overlaps with beam center |
Axilens Horizontal | XPS:LI20:MC04 | PB3 Lens Horizontal | M3 | 5.899 | Axicon beam center overlaps with beam center |
USHM | XPS:LI20:MC03 | PB10 M2 Removal Stage | M1 | 0.5 mm / 41 mm | in/out (E320 position) |
EOS
Desc | XPS Controller | Motor name | Channel | Position | Desc. position |
---|---|---|---|---|---|
EOS removal | XPS:LI20:MC04 | PB4 EOS Assembly Removal | M4 | 12 mm/ 50mm | in/out |
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