intro: this doc will walk you through starting up the RGA, gathering data, and sending it off for qualification. It assumes you are using an MKS brand RGA.
highest pressure for RGA use: 7.6E-6 torr
...
intro: this doc will walk you through starting up the RGA, gathering data, and sending it off for qualification. It assumes you are using an MKS brand RGA.
highest pressure for RGA use: 7.6E-6 torr
...