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Initial tests to verify the 100nm positional stability requirement were carried out with the help of Georg Gassner.
STA provided a sample vibration spectrum measured with their confocal setup in the course of a flatness measurement:
...
Initial tests to verify the 100nm positional stability requirement were carried out with the help of Georg Gassner.
STA provided a sample vibration spectrum measured with their confocal setup in the course of a flatness measurement: