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X-Y quality check for optical metrology measurements
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segm: S1 S2 dS1 dS2 L1 L2 dL1 dL2 angle(deg) D1 D2 dD d(dS) d(dL)
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segm: 0 36697 36688 18 9 39685 39676 9 0 -0.01949 54057 54032 24 9 9
segm: 1 36672 36696 90 114 39690 39688 -93 -95 -0.14725 54046 54045 0 -24 2
segm: 2 36703 36700 202 199 39695 39782 -183 -96 -0.28908 54127 54060 67 3 -87
segm: 3 36683 36700 260 277 39677 39695 -243 -225 -0.38763 54060 54039 20 -17 -18
segm: 4 36710 36693 -274 -291 39685 39687 270 272 -0.40785 54063 54049 14 17 -2
segm: 5 36686 36679 -408 -415 39699 39688 406 395 -0.59396 54065 54036 29 7 11
segm: 6 36684 36676 -134 -142 39693 39693 115 115 -0.19920 54036 54055 -18 8 0
segm: 7 36696 36705 -287 -278 39693 39706 256 269 -0.40771 54066 54064 1 -9 -13
segm: 8 36675 36684 162 171 39688 39674 -146 -160 -0.24041 54037 54036 1 -9 14
segm: 9 36679 36678 232 231 39671 39683 -220 -208 -0.33429 54034 54034 0 1 -12
segm:10 36679 36682 253 256 39677 39694 -240 -223 -0.36743 54044 54039 5 -3 -17
segm:11 36693 36701 367 375 39714 39690 -343 -367 -0.53539 54057 54075 -17 -8 24
segm:12 36677 36682 -378 -373 39671 39686 340 355 -0.54221 54038 54037 0 -5 -15
segm:13 36670 36681 -108 -97 39685 39679 98 92 -0.14800 54035 54034 0 -11 6
segm:14 36683 36671 -96 -108 39693 39664 104 75 -0.14729 54029 54036 -7 12 29
segm:15 36686 36677 -163 -172 39690 39677 169 156 -0.24184 54046 54034 11 9 13
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WARNING segm 2: |67| > 60.0
WARNING segm 2: |-87| > 60.0
Z quality check for optical metrology measurements
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segm: SA LA XSize YSize dZS1 dZS2 dZL1 dZL2 dZSA dZLA ddZS ddZL dZX dZY angXZ(deg) angYZ(deg) dz3(um)
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segm: 0 36692 39680 36692 39680 0 0 0 0 0 0 0 0 0 0 0.00000 0.00000 0.000
segm: 1 36684 39689 36684 39689 0 0 0 0 0 0 0 0 0 0 0.00000 0.00000 0.000
segm: 2 36701 39738 36701 39738 21 96 -77 -2 58 -39 -75 -75 58 -39 0.09133 -0.05695 -75.171
segm: 3 36691 39686 36691 39686 68 0 -32 -100 34 -66 68 68 34 -66 0.05309 -0.09529 68.017
segm: 4 36701 39686 39686 36701 0 0 0 0 0 0 0 0 0 0 0.00000 0.00000 0.000
segm: 5 36682 39693 39693 36682 0 0 0 0 0 0 0 0 0 0 0.00000 0.00000 0.000
segm: 6 36680 39693 39693 36680 0 0 0 0 0 0 0 0 0 0 0.00000 0.00000 0.000
segm: 7 36700 39699 39699 36700 0 0 0 0 0 0 0 0 0 0 0.00000 0.00000 0.000
segm: 8 36679 39681 36679 39681 0 0 0 0 0 0 0 0 0 0 0.00000 0.00000 0.000
segm: 9 36678 39677 36678 39677 2 0 2 0 1 1 2 2 1 1 0.00156 0.00144 2.001
segm:10 36680 39685 36680 39685 -33 -34 0 -1 -33 0 1 1 -33 0 -0.05233 -0.00072 0.997
segm:11 36697 39702 36697 39702 0 79 -79 0 39 -39 -79 -79 39 -39 0.06167 -0.05700 -78.952
segm:12 36679 39678 39678 36679 172 0 211 39 86 125 172 172 125 86 0.18050 0.13434 -172.099
segm:13 36675 39682 39682 36675 -108 0 -108 0 -54 -54 -108 -108 -54 -54 -0.07797 -0.08436 108.015
segm:14 36677 39678 39678 36677 0 0 11 11 0 11 0 0 11 0 0.01588 0.00000 0.008
segm:15 36681 39683 39683 36681 -77 0 -77 0 -38 -38 -77 -77 -38 -38 -0.05559 -0.06014 76.956
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WARNING segm 12: |-172.1| > 100.0
WARNING segm 13: |108.0| > 100.0 |
DAQ panel indexes in optical metrology possible detector orientations
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rot = 0 ^y Q0 1 3 | 4 5 Q1 0 2 | 6 7 ---------+----------> x 15 14 | 10 8 Q3 13 12 | 11 9 Q2 rot = 1 ^y Q3 13 15 | 0 1 Q0 12 14 | 2 3 ---------+----------> x 11 10 | 6 4 Q2 9 8 | 7 5 Q1 rot = 2 ^y Q2 9 11 | 12 13 Q3 8 10 | 14 15 ---------+----------> x 7 6 | 2 0 Q1 5 4 | 3 1 Q0 rot = 3 ^y Q1 5 7 | 8 9 Q2 4 6 | 10 11 ---------+----------> x 3 2 | 14 12 Q0 1 0 | 15 13 Q3 |
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