Page History
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- X-Y precision of measurements is about 60um
- Tilt angles are in range from -0.33 to 0.27 degree
- Z deviations from flatness are in the range from -63 to 152um
Geometry parameters
center/0-end.data (pixel)
...
| No Format |
|---|
197.94 198.05 304.45 97.98 623.08 623.74 706.30 498.64
198.22 198.17 304.58 97.25 622.90 623.09 708.37 495.18
197.22 198.51 300.71 96.77 621.46 620.95 709.39 496.88
198.80 198.29 304.26 101.44 625.93 625.40 705.81 497.16
301.22 95.14 621.13 621.36 516.12 724.42 197.91 196.12
303.12 94.88 619.87 620.29 515.50 722.83 197.13 196.76
301.51 94.34 622.96 623.24 519.67 725.08 198.86 198.69
300.50 94.63 621.71 622.07 515.69 722.61 196.56 195.96
0.47 0.17 -0.25 0.17 0.65 -0.19 -0.14 -0.50
0.36 -0.16 -0.07 0.03 0.38 -0.13 -0.04 -0.18
0.01 -0.37 0.95 -0.22 0.08 -0.75 0.21 0.05
-0.05 -0.08 0.25 0.19 0.03 -0.21 0.21 0.12 |
or the same in um:
...
| No Format |
|---|
21757 21769 33464 10769 68489 68561 77637 54810
21788 21783 33479 10689 68469 68489 77863 54430
21678 21820 33054 10637 68310 68254 77976 54617
21851 21796 33444 11150 68801 68743 77582 54648
33110 10457 68275 68299 56732 79628 21754 21558
33319 10429 68135 68182 56664 79453 21668 21628
33141 10369 68476 68506 57121 79700 21858 21839
33030 10402 68338 68378 56684 79429 21605 21540
51 18 -28 18 71 -20 -15 -54
39 -18 -7 3 41 -14 -4 -20
1 -40 104 -24 9 -82 23 6
-5 -8 27 20 2 -23 23 13 |
tilt/0-end.data (degree)
...
| No Format |
|---|
0.04474 0.01053 -0.01645 -0.02828 -0.05128 -0.03552 -0.33658 -0.06315
0.03750 -0.06382 -0.06119 -0.00197 -0.07697 0.01381 0.15327 0.05528
-0.03948 -0.23876 -0.10659 -0.06711 0.16514 0.11842 0.09802 0.19144
-0.10922 -0.13684 0.13617 -0.17232 -0.07560 -0.00263 0.27292 0.24731 |
...
offset/0-end.data
| No Format |
|---|
0 |
...
0 820 820
0 820 820 0
0 0 0 0 |
0 820 820 00 0 0 0
offset_corr/0-end.data
| No Format |
|---|
0 |
...
0 |
...
0 |
...
0 |
...
0 |
...
0 |
...
0 |
...
0 |
...
0 |
...
0 |
...
0 |
...
0 |
marg_gap_shift/0-end.data
15 40 2 2515 40 2 25| No Format |
|---|
15 40 2 25
15 40 2 25
0 0 0 |
...
0 |
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