Metrology data

Chris Kenney: All 4 MEC Quads as well as the UED one are now engraved.

Quad-3 had a module replaced and so we had to redo the metrology.

Quality check

optical_metrology_check 2021-01-27-epix10kaquad3-mec-metrology.txt

X-Y quality check for optical metrology measurements 
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segm:        S1      S2     dS1     dS2        L1      L2     dL1     dL2    angle(deg)   D1      D2      dD   d(dS)   d(dL)
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segm: 0   38064   38006      58       0     40989   40988     -49     -50    0.04054   55900   55933     -33      58       1
segm: 1   38001   38004     103     106     41002   41010    -100     -92    0.14601   55909   55907       1      -3      -8
segm: 2   37970   37988     176     194     40978   40966    -166    -178    0.25870   55867   55868       0     -18      12
segm: 3   37976   37978     165     167     40973   40969    -142    -146    0.23214   55873   55858      15      -2       4
----------------------------------------------------------------------------------------------------------------------------


Z quality check for optical metrology measurements 
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segm:        SA      LA   XSize   YSize    dZS1  dZS2  dZL1  dZL2    dZSA  dZLA  ddZS  ddZL     dZX   dZY   angXZ(deg) angYZ(deg) dz3(um)
-----------------------------------------------------------------------------------------------------------------------------------------
segm: 0   38035   40988   40988   38035     -73   -75    -6    -8     -74    -7     2     2      -7   -74  -0.00978   -0.11147     -2.111
segm: 1   38002   41006   41006   38002     -10   -92  -121  -203     -51  -162    82    82    -162   -51  -0.22635   -0.07689    -81.975
segm: 2   37979   40972   40972   37979     -51   -61   125   115     -56   120    10    10     120   -56   0.16781   -0.08448     -9.939
segm: 3   37977   40971   40971   37977      75    65   281   271      70   276    10    10     276    70   0.38597    0.10561     -9.976
-----------------------------------------------------------------------------------------------------------------------------------------

Geometry file

  • command: optical_metrology_epix10ka2m -i 2021-01-27-epix10kaquad3-mec-metrology.txt -r3 -A0 -Z-100000 -o 2021-01-27-epix10kaquad3-mec-geometry.txt
  • geometry file: /reg/g/psdm/detector/alignment/epix10kaquad/2021-01-27-epix10kaquad3-mec/2021-01-27-epix10kaquad3-mec-geometry.txt

Validation on data

References


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